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1. 发明公开

EP0789160A3 Magnetically levitated vibration damping apparatus 失效
标题翻译：磁悬浮减振装置
公开(公告)号：EP0789160A3
公开(公告)日：1998-07-08
申请号：EP96112788
申请日：1996-08-08
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KATSUHIDE , KANEMITSU YOICHI , HAGA TAKAHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RYUTA
IPC分类号： F16F15/02 , F16F15/03 , F16F15/00
CPC分类号： F16F15/02 , F16F15/03
摘要： A magnetically levitated vibration damping apparatus includes a table (11) having a flat board of a magnetic material, an electromagnetic actuator (12) for applying magnetic attractive forces to the flat board to levitate the table (11), a displacement sensor (14) for detecting relative displacement between the flat board and the electromagnetic actuator (12), an acceleration sensor (13) for detecting absolute acceleration of the table (11), and a control system (15) for controlling a current supplied to the electromagnetic actuator (12) based on signals from the displacement sensor (14) and the acceleration sensor (13) according to a first control rule for controlling a gap (Z) between the flat board and the electromagnetic actuator (12) based on the signal from the acceleration sensor (13) and a second control rule for controlling vibrations of the table (11) based on the signal from the acceleration sensor (13), the second control rule including stability control (15) of relative displacement of the table (11).

2. 发明专利

DE69311650D1 未知
公开(公告)号：DE69311650D1
公开(公告)日：1997-07-24
申请号：DE69311650
申请日：1993-08-24
申请人： EBARA CORP , KAJIMA CORP
发明人： YANO KENICHI , KANEMITSU YOICHI , WATANABE KATSUHIDE
IPC分类号： E04F15/18 , F16F15/03

3. 发明专利

DE69311650T2 未知
公开(公告)号：DE69311650T2
公开(公告)日：1998-01-15
申请号：DE69311650
申请日：1993-08-24
申请人： EBARA CORP , KAJIMA CORP
发明人： YANO KENICHI , KANEMITSU YOICHI , WATANABE KATSUHIDE
IPC分类号： E04F15/18 , F16F15/03

4. 发明专利

JPH0777240A VIBRATION ELIMINATOR 失效
公开(公告)号：JPH0777240A
公开(公告)日：1995-03-20
申请号：JP17241893
申请日：1993-06-18
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KAZUHIDE , KANEMITSU YOICHI , YANO KENICHI
IPC分类号： F16F15/02 , F16F15/03 , G03F7/20 , H01J37/26 , H01L21/027
摘要： PURPOSE:To provide a vibration eliminator that can eliminate all vibrations ranging from a relatively low frequency vibration in the horizontal direction to a high frequency minute vibration after suspending a damping mount floorboard levitatively from a setup floor. CONSTITUTION:In a vibration eliminator consisting of a displacement sensor 5 detecting the extent of relative displacement in an air gap between a magnetic substance 3 locked to a damping mount floorboard 1 and a levitating electromagnet 4 locked to the side of a setup floor, and two controllers 9 and 10 controlling the electromagnet for levitating the damping mount floorboard by means of a signal out of this displacement sensor, a pole face 18 of the magnetic substance clamped to the damping mount floorboard is so constituted that it is made larger than another pole face 17 of the levitating electromagnet clamped to the setup floor side and also made so as not to generate restoring force in the horizontal direction. In addition, it is provided with s displacement sensor 20 detecting the extent of relative displacement between the damping mount floorboard and the setup floor side in the horizontal direction, and an electromagnet 14 controlling magnetic force in the horizontal direction and also four controllers 21, 22, 23 and 24 which control horizontal relative displacement and speed between the damping mount floorboard and the setup floor for feedback and further control a horizontal controlling electromagnet.

5. 发明专利

JPH06294445A VIBRATION RESISTING DEVICE 失效
公开(公告)号：JPH06294445A
公开(公告)日：1994-10-21
申请号：JP10628393
申请日：1993-04-07
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KAZUHIDE , KANEMITSU YOICHI , YANO KENICHI
IPC分类号： F16F15/03 , G05D19/02
摘要： PURPOSE:To provide a vibration resisting device for eliminating even very small vibration by floating and suspending a vibration resisting base floor plate from a setting floor, by detecting various vibration modes of the vibration resisting base floor plate or the setting floor, and thereby actively vibration resistance-controlling the vibration. CONSTITUTION:In a vibration resisting device consisting of a vibration resisting base floor plate 1 for loading a device, for which vibration is to be avoided, a magnetic body 3 fixed to the vibration resisting base floor plate 1, and a levitating electromagnet 4 fixed to the side of a setting floor side for supporting the magnetic body 3 non-contact by magnetic force, an acceleration detector for detecting horizontal vibration is fitted in the vibration resisting base floor plate 1. The detected acceleration signal in the horizontal direction, the velocity signal, for which the acceleration signal is integrated once, and the displacement signal, for which the acceleration signal is integrated twice, are multiplied by a coefficient, and the results are fed back to an electromagnet 14 for horizontal control through a current amplifier 10 for exciting an electromagnet.

6. 发明专利

JPH07181395A MICROSCOPIC DEVICE 失效
公开(公告)号：JPH07181395A
公开(公告)日：1995-07-21
申请号：JP34788093
申请日：1993-12-24
申请人： EBARA CORP , KAJIMA CORP
发明人： KANEMITSU YOICHI , WATANABE KAZUHIDE , IKEDA YUKIO , HIROSE MASAYOSHI , YANO KENICHI
IPC分类号： G02B21/24 , F16F15/03
摘要： PURPOSE:To load a microscope on a vibration resisting device by magnetic levitation capable of realizing a high performance vibration resistance, and provide a microscopic device capable of realizing a high enlargement power. CONSTITUTION:A microscopic device is loaded on a vibration resisting table 1 supported by use of a plurality of electromagnetic actuators 9 having a magnetic yoke fixed to the vibration resisting table 1, a levitating electromagnet 3 fixed to a setting floor 4 for levitating and supporting the magnetic yoke by the magnetic force with non-contact, a displacement sensor 5 for measuring the clearance between the levitating electromagnet 3 and the magnetic yoke, a compensating circuit for outputting an electromagnet exciting current on the basis of the output from the displacement sensor 5 in order to stably levitate the vibration resisting table 1, and a controller constituted from a power amplifier.

7. 发明专利

JPH06288494A PIPELINE SUPPORTING DEVICE 失效
公开(公告)号：JPH06288494A
公开(公告)日：1994-10-11
申请号：JP25059392
申请日：1992-08-26
申请人： KAJIMA CORP , EBARA CORP
发明人： YANO KENICHI , KANEMITSU YOICHI , WATANABE KAZUHIDE
IPC分类号： F16F15/03 , F16L3/16
摘要： PURPOSE:To keep the vibration of a pipelines, provided in a building, from being transmitted to the building so as to prevent the generation of unpleasant noise. CONSTITUTION:A pipeline supporting device for supporting a pipeline 10 for letting a fluid flow, to a fixed part 12 in a supporting position is provided with a magnetic yoke 13 fitted to the outer peripheral surface 14 of a pipeline 10 in the supporting position 11; electromagnets 16 fitted to the fixed part 12 so as to generate attracting force to the yoke 13 to support the yoke 13 in the contactless state; a displacement sensor 20 for detecting the displacement of a clearance D between the electromagnets 16 and the yoke 13; a compensating circuit 21 for generating a control signal for making the clearance D constant on the basis of a detection signal outputted from the displacement sensor 20; and power amplifiers 23 for generating exciting currents for exciting the exciting coils of the electromagnets 16 on the basis of a control signal from the compensating circuit 21.

8. 发明专利

JPH06288071A ELECTROMAGNETIC TYPE FLOATING FLOOR STRUCTURE 失效
公开(公告)号：JPH06288071A
公开(公告)日：1994-10-11
申请号：JP25059892
申请日：1992-08-26
申请人： KAJIMA CORP , EBARA CORP
发明人： YANO KENICHI , KANEMITSU YOICHI , WATANABE KAZUHIDE
IPC分类号： E04F15/18 , F16F15/03
摘要： PURPOSE:To separate a floor from building posts or beams and keep the floor isolated from vibration by floating and holding a building floor structure with an electromagnetic actuator. CONSTITUTION:There are provided a floating floor 24, which are floated and supported with an electromagnetic actuator 2 at a large number of support points 31 and a light emitting part 25 which emits beam light in the horizontal direction installed to a building post 22 or beams and an optical sensor 26 which is fixed with the floating floor 24 and outputs a signal which responds to the position at the beam light. Since the floating floor 24 at each support point 31 receives the beam light in the longitudinal direction with the optical sensor 26, the vertical position of the floating floor 24 is controlled with the electromagnetic actuator 2 base on an output positional signal of the floating floor.

9. 发明专利

JPH09112628A MAGNETIC LEVITATION VIBRATION RESISTANT DEVICE 失效
公开(公告)号：JPH09112628A
公开(公告)日：1997-05-02
申请号：JP21198896
申请日：1996-07-23
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KAZUHIDE , KANEMITSU YOICHI , HAGA NAOHIDE , YANO KENICHI , MIZUNO TAKAYUKI , KATAMURA RIYUUTA
IPC分类号： F16F15/02 , F16F15/03 , G05D19/02 , H01L21/02
摘要： PROBLEM TO BE SOLVED: To remove vibrations satisfactorily even in vertical direction. SOLUTION: A magnetic levitation vibration resistant device is composed of a table equipped with a flat plate made of a magnetic substance and an electromagnetic actuator 12 which exerts a magnetic attraction force to the flat plate and suspends the table afloat, wherein the arrangement includes a displacement sensor 14 to measure the relative displacement between the surface of flat plate and the magnetic pole face of the electromagnet, an acceleration sensor 13 to measure the absolute acceleration of the table, and a control device 15 to control the energizing current for the electromagnet on the basis of the signals given by the sensors. The control device 15 works according to two control laws, i.e., the control law to be used in controlling the gap between the surface of the flat plate and the magnetic pole face of the elecromagnet and control law to be used in controlling the vibration on the basis of the signal given by the acceleration sensor 13, wherein the stability control for the relative displacement of the table is included in the latter, i.e., the control law for controlling the vibration.

10. 发明专利

JPH06294444A VIBRATION RESISTING DEVICE 失效
公开(公告)号：JPH06294444A
公开(公告)日：1994-10-21
申请号：JP10628293
申请日：1993-04-07
申请人： EBARA CORP , KAJIMA CORP
发明人： WATANABE KAZUHIDE , KANEMITSU YOICHI , SATO KAZUKI , YANO KENICHI , MIZUNO TAKAYUKI
IPC分类号： E04F15/18 , F16F15/03
摘要： PURPOSE:To provide a vibration resisting device of a compact structure, which has sufficient vibration resisting effect under a non-contact condition against vibration of large horizontal amplitude by using a permanent magnet instead of a horizontal electromagnet, and which can respond to wide vibration range from very small vibration to earthquake. CONSTITUTION:A device is provided with a vibration resisting board floor plate 1 for loading a device, for which vibration is to be avoided, a magnetic substance 3 fixed to the vibration resisting board floor plate 1, a levitating electromagnet 4 fixed to the setting floor side for supporting the magnetic substance 3 by magnetic force under a non-contact condition, and a displacement sensor for detecting relative displacement in the gap between magnetic substance 3 fixed to the vibration resisting board floor plate 1 and the levitating electromagnet 4 fixed to the setting floor side. In the vibration resisting device consisting of a controller 7 provided with a control circuit for controlling the electromagnet 4 to levitate the vibration resisting board floor plate 1 by the signal of the displacement sensor 5, a permanent magnet 11 fixed to the vibration resisting board floor plate 1 and a permanent magnet 12 fixed to the floor side are opposed to one another so that the polarities are reverse. Repulsive force is generated between the opposed surfaces, and the vibration resisting board floor plate 1 can be supported non-contact even in the horizontal direction.

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