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    • 1. 发明申请
    • FILM FORMATION APPARATUS AND METHOD FOR USING SAME
    • 胶片形成装置及其使用方法
    • US20100189927A1
    • 2010-07-29
    • US12684283
    • 2010-01-08
    • Jun SATOKiyotaka KikuchiHiroki MurakamiShigeru NakajimaKazuhide Hasebe
    • Jun SATOKiyotaka KikuchiHiroki MurakamiShigeru NakajimaKazuhide Hasebe
    • C23C16/50C23C16/44C23C16/00C23C16/52
    • C23C16/4405
    • A method for using a film formation apparatus includes performing a main cleaning process and a post cleaning process in this order inside a reaction chamber. The main cleaning process is arranged to supply a cleaning gas containing fluorine into the reaction chamber while exhausting gas from inside the reaction chamber, thereby etching a film formation by-product containing silicon. The post cleaning process is arranged to remove a silicon-containing fluoride generated by the main cleaning process and remaining inside the reaction chamber and to alternately repeat, a plurality of times, supplying an oxidizing gas into the reaction chamber to transform the silicon-containing fluoride into an intermediate product by oxidization, and supplying hydrogen fluoride gas into the reaction chamber while exhausting gas from inside the reaction chamber to remove the intermediate product by a reaction between the hydrogen fluoride gas and the intermediate product.
    • 使用成膜装置的方法包括在反应室内依次进行主清洗处理和后清洗处理。 主要的清洗过程是在从反应室内部排出气体的同时,向反应室内供给含有氟的清洗气体,从而蚀刻含有硅的成膜副产物。 后清洗处理被设置为除去由主要清洗过程产生的含氟氟化物,并保留在反应室内,并交替重复多次,将氧化气体供应到反应室中以将含硅氟化物 通过氧化进入中间产物,并且在从反应室内排出气体的同时将氟化氢气体供应到反应室中,以通过氟化氢气体和中间产物之间的反应除去中间产物。
    • 2. 发明授权
    • Film formation apparatus and method for using same
    • 成膜装置及其使用方法
    • US08349401B2
    • 2013-01-08
    • US12684283
    • 2010-01-08
    • Jun SatoKiyotaka KikuchiHiroki MurakamiShigeru NakajimaKazuhide Hasebe
    • Jun SatoKiyotaka KikuchiHiroki MurakamiShigeru NakajimaKazuhide Hasebe
    • B05D7/22C23C16/00
    • C23C16/4405
    • A method for using a film formation apparatus includes performing a main cleaning process and a post cleaning process in this order inside a reaction chamber. The main cleaning process is arranged to supply a cleaning gas containing fluorine into the reaction chamber while exhausting gas from inside the reaction chamber, thereby etching a film formation by-product containing silicon. The post cleaning process is arranged to remove a silicon-containing fluoride generated by the main cleaning process and remaining inside the reaction chamber and to alternately repeat, a plurality of times, supplying an oxidizing gas into the reaction chamber to transform the silicon-containing fluoride into an intermediate product by oxidization, and supplying hydrogen fluoride gas into the reaction chamber while exhausting gas from inside the reaction chamber to remove the intermediate product by a reaction between the hydrogen fluoride gas and the intermediate product.
    • 使用成膜装置的方法包括在反应室内依次进行主清洗处理和后清洗处理。 主要的清洗过程是在从反应室内部排出气体的同时,向反应室内供给含有氟的清洗气体,从而蚀刻含有硅的成膜副产物。 后清洗处理被设置为除去由主要清洗过程产生的含氟氟化物,并保留在反应室内,并交替重复多次,将氧化气体供应到反应室中以将含硅氟化物 通过氧化进入中间产物,并且在从反应室内排出气体的同时将氟化氢气体供应到反应室中,以通过氟化氢气体和中间产物之间的反应除去中间产物。
    • 3. 发明授权
    • Electromagnetic rotary vibrator and damper for a rotary body
    • 用于旋转体的电磁旋转振动器和阻尼器
    • US5834867A
    • 1998-11-10
    • US623954
    • 1996-03-29
    • Kiyotaka KikuchiKiyoshi Gunji
    • Kiyotaka KikuchiKiyoshi Gunji
    • F16F15/32F16C32/04F16F15/36G01M1/30G01M7/04G05D19/02H02K7/065H02K7/09
    • G01M7/045G01M1/30
    • An apparatus for electromagnetically and rotationally vibrating a rotary body that is supported by bearings. The apparatus comprises a ring-shaped magnet bipolarly magnetized and mounted coaxially on a shaft of the rotary body, a ring-shaped stator having a coil and adapted to generate a rotating magnetic field by controlling an electric current supplied to the coil, and a frequency variable vibration power source adapted to supply alternating electric power to the coil in the stator. The distance between a location of a magnetic pole in the stator and an axis of the shaft is different than the distance between a location of a magnetic pole in the magnet and the axis of the shaft. The magnet and the stator are disposed so as to be adjacent to each other. Thus a rotational exciting force is applied to the rotary body by an interaction of the rotating magnet field generated by the stator with the magnet. This electromagnetic rotary vibrator can be applied to a damper for offsetting the unbalanced vibration of a rotary body.
    • 一种用于对由轴承支撑的旋转体进行电磁旋转振动的装置。 该装置包括:双极磁化并同轴地安装在旋转体的轴上的环状磁体,具有线圈的环形定子,其适于通过控制供给线圈的电流而产生旋转磁场,频率 可变振动源适于向定子中的线圈提供交流电力。 定子中的磁极的位置与轴的轴线之间的距离不同于磁体中磁极的位置与轴的轴线之间的距离。 磁体和定子被配置为彼此相邻。 因此,通过由定子产生的旋转磁场与磁体的相互作用,旋转激励力被施加到旋转体。 该电磁旋转振动器可以应用于用于抵消旋转体的不平衡振动的阻尼器。
    • 4. 发明授权
    • Electromagnetic rotary vibrator for a rotary body
    • 用于旋转体的电磁旋转振动器
    • US6023116A
    • 2000-02-08
    • US944430
    • 1997-10-06
    • Kiyotaka KikuchiKiyoshi Gunji
    • Kiyotaka KikuchiKiyoshi Gunji
    • F16F15/32F16C32/04F16F15/36G01M1/30G01M7/04G05D19/02H02K7/065H01L41/08
    • G01M7/045G01M1/30
    • An apparatus for electromagnetically and rotationally vibrating a rotary body that is supported by bearings. The apparatus comprises a ring-shaped magnet bipolarly magnetized and mounted coaxially on a shaft of the rotary body, a ring-shaped stator having a coil and adapted to generate a rotating magnetic field by controlling an electric current supplied to the coil, and a frequency variable vibration power source adapted to supply alternating electric power to the coil in the stator. The distance between a location of a magnetic pole in the stator and an axis of the shaft is different than the distance between a location of a magnetic pole in the magnet and the axis of the shaft. The magnet and the stator are disposed so as to be adjacent to each other. Thus a rotational exciting force is applied to the rotary body by an interaction of the rotating magnet field generated by the stator with the magnet. This electromagnetic rotary vibrator can be applied to a damper for offsetting the unbalanced vibration of a rotary body.
    • 一种用于对由轴承支撑的旋转体进行电磁旋转振动的装置。 该装置包括:双极磁化并同轴地安装在旋转体的轴上的环状磁体,具有线圈的环形定子,其适于通过控制供给线圈的电流而产生旋转磁场,频率 可变振动源适于向定子中的线圈提供交流电力。 定子中的磁极的位置与轴的轴线之间的距离不同于磁体中磁极的位置与轴的轴线之间的距离。 磁体和定子被配置为彼此相邻。 因此,通过由定子产生的旋转磁场与磁体的相互作用,旋转激励力被施加到旋转体。 该电磁旋转振动器可以应用于用于抵消旋转体的不平衡振动的阻尼器。
    • 6. 发明授权
    • Method and apparatus for evaluating vibrations of a rotary body while
maintaining the rotary body in a static or non-rotational state
    • 在将旋转体保持在静止或非旋转状态的同时评价旋转体的振动的方法和装置
    • US5717141A
    • 1998-02-10
    • US625070
    • 1996-03-29
    • Kiyotaka KikuchiKiyoshi Gunji
    • Kiyotaka KikuchiKiyoshi Gunji
    • G01H11/02G01H1/10G01H13/00G01M1/14G01M99/00G01M7/02
    • G01H1/10
    • A method and apparatus for evaluating the vibration of a rotary body in a static or non-rotational state to determine a profile of critical speeds including profiles of critical speeds which exist beyond a rated revolution velocity of the rotary body. This invention comprises: a plurality of bearings for maintaining the rotary body in a non-rotating or static condition; a rotary vibrator for applying an exciting force which is rotated about a shaft to the rotary body; a vibration sensor for detecting the vibration of the rotary body; a vibration meter for measuring an output from the vibration sensor; and a vibration power source for supplying AC power to the rotary vibrator and for sweeping a frequency of the exciting force applied from the rotary vibrator to the rotary body from a low-frequency region to a high-frequency region. Thus, the present invention obtains the vibrational characteristics of the rotary body in a simulated rotational or dynamic state in which the rotating body is actually maintained in a static or non-rotational state.
    • 一种用于评估旋转体在静态或非旋转状态下的振动的方法和装置,以确定临界速度的轮廓,包括存在于旋转体的额定旋转速度之外的临界速度的轮廓。 本发明包括:用于将旋转体保持在非旋转或静止状态的多个轴承; 旋转振动器,用于将围绕轴旋转的激励力施加到旋转体; 用于检测旋转体的振动的振动传感器; 用于测量来自振动传感器的输出的振动计; 以及用于向旋转振动器提供AC电力并且将从旋转振动器施加的激励力的频率从低频区域扫描到旋转体的振动电源到高频区域。 因此,本发明在旋转体实际上保持静止或非旋转状态的模拟旋转或动态状态下获得旋转体的振动特性。