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    • 4. 发明授权
    • Triodes using nanofabric articles and methods of making the same
    • 使用纳米制品的三极管和制造相同的方法
    • US08115187B2
    • 2012-02-14
    • US12124475
    • 2008-05-21
    • Brent M. SegalJonathan W. WardThomas Rueckes
    • Brent M. SegalJonathan W. WardThomas Rueckes
    • H01L29/02
    • H01J21/10H01J3/021H01J19/38H01J2203/0232Y10S977/742
    • Vacuum microelectronic devices with carbon nanotube films, layers, ribbons and fabrics are provided. The present invention discloses microelectronic vacuum devices including triode structures that include three-terminals (an emitter, a grid and an anode), and also higher-order devices such as tetrodes and pentodes, all of which use carbon nanotubes to form various components of the devices. In certain embodiments, patterned portions of nanotube fabric may be used as grid/gate components, conductive traces, etc. Nanotube fabrics may be suspended or conformally disposed. In certain embodiments, methods for stiffening a nanotube fabric layer are used. Various methods for applying, selectively removing (e.g. etching), suspending, and stiffening vertically- and horizontally-disposed nanotube fabrics are disclosed, as are CMOS-compatible fabrication methods. In certain embodiments, nanotube fabric triodes provide high-speed, small-scale, low-power devices that can be employed in radiation-intensive applications.
    • 提供具有碳纳米管膜,层,带和织物的真空微电子器件。 本发明公开了包括三端(发射极,栅极和阳极)的三极管结构的微电子真空装置,以及诸如四极和五极管的高阶器件,所有这些都使用碳纳米管来形成 设备。 在某些实施例中,纳米管织物的图案化部分可以用作栅极/栅极部件,导电迹线等。纳米管织物可以悬挂或保形地设置。 在某些实施例中,使用用于加强纳米管织物层的方法。 公开了用于施加,选择性地去除(例如蚀刻)悬浮和加强垂直和水平布置的纳米管织物的各种方法,以及CMOS兼容的制造方法。 在某些实施例中,纳米管织物三极管提供可用于辐射密集型应用中的高速,小规模,低功率的器件。
    • 6. 发明申请
    • Electromagnetic and Thermal Sensors Using Carbon Nanotubes and Methods of Making Same
    • 使用碳纳米管的电磁和热传感器及其制作方法
    • US20080251723A1
    • 2008-10-16
    • US12046855
    • 2008-03-12
    • Jonathan W. WardElwood James EgertonRahul SenBrent M. Segal
    • Jonathan W. WardElwood James EgertonRahul SenBrent M. Segal
    • H01L27/144H01L31/18H01L31/0264
    • G01T1/16G01J5/02G01J5/023G01J5/046G01J5/08G01J5/0846G01J5/0853G01J5/20G01J5/24
    • Electromagnetic radiation detecting and sensing systems using carbon nanotube fabrics and methods of making the same are provided. In certain embodiments of the invention, an electromagnetic radiation detector includes a substrate, a nanotube fabric disposed on the substrate, the nanotube fabric comprising a non-woven network of nanotubes, and first and second conductive terminals, each in electrical communication with the nanotube fabric, the first and second conductive terminals disposed in space relation to one another. Nanotube fabrics may be tuned to be sensitive to a predetermined range of electromagnetic radiation such that exposure to the electromagnetic radiation induces a change in impedance between the first and second conductive terminals. The detectors include microbolometers, themistors and resistive thermal sensors, each constructed with nanotube fabric. Nanotube fabric detector arrays may be formed for broad-range electromagnetic radiation detecting. Methods for making nanotube fabric detectors, arrays, microbolometers, thermistors and resistive thermal sensors are each described.
    • 提供了使用碳纳米管织物的电磁辐射检测和感测系统及其制造方法。 在本发明的某些实施例中,电磁辐射检测器包括衬底,布置在衬底上的纳米管织物,纳米管织物包括纳米管的无纺网络,以及第一和第二导电端子,每个与纳米管织物电连通 ,所述第一和第二导电端子彼此空间关系地设置。 纳米管织物可以被调谐为对预定范围的电磁辐射敏感,使得暴露于电磁辐射会引起第一和第二导电端子之间的阻抗变化。 检测器包括微伏表,电阻器和电阻式热传感器,每个由纳米管织物构成。 纳米管织物检测器阵列可以形成用于宽范围电磁辐射检测。 每个都描述制造纳米管织物检测器,阵列,微量热敏电阻,热敏电阻和电阻热传感器的方法。