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    • 3. 发明授权
    • Color filter array having hybrid color filters and manufacturing method thereof
    • 具有混合滤色器的滤色器阵列及其制造方法
    • US08765333B2
    • 2014-07-01
    • US13561103
    • 2012-07-30
    • Cheng-Hung Yu
    • Cheng-Hung Yu
    • G02B5/20G03F7/20
    • G02B5/201G03F7/0007
    • A method for manufacturing a color filter array having hybrid color filters includes providing a high-grade photoresist and a low-grade photoresist, forming a plurality of first color filters on a substrate, and forming a plurality of second color filters and a plurality of third color filters on the substrate. The first color filters include the high-grade photoresist, and the second color filters and the third color filters include the low-grade photoresist. The high-grade photoresist of the first color filters includes a first amount of large size pigments in one unit area and the low-grade photoresists of the second color filters and the third color filters include a second amount of large size pigments in one unit area. A ratio of the second amount to the first amount is equal to or larger than 1.
    • 一种制造具有混合滤色器的滤色器阵列的方法,包括提供高级光致抗蚀剂和低等级光致抗蚀剂,在衬底上形成多个第一滤色器,以及形成多个第二滤色器和多个第三滤色器 基底上的滤色器。 第一滤色器包括高级光致抗蚀剂,第二滤色器和第三滤色器包括低等级光致抗蚀剂。 第一滤色器的高级光致抗蚀剂包括在一个单位面积中的第一量的大尺寸颜料和第二滤色器的低等级光致抗蚀剂和第三滤色器在一个单位面积中包括第二量的大尺寸颜料 。 第二量与第一量的比例等于或大于1。
    • 5. 发明申请
    • METHOD OF FABRICATING IMAGE SENSOR AND REWORKING METHOD THEREOF
    • 制作图像传感器的方法及其制作方法
    • US20110212567A1
    • 2011-09-01
    • US12714093
    • 2010-02-26
    • Hsin-Ting TSAICheng-Hung YuChin-Kuang LiuKun-Yen Hsu
    • Hsin-Ting TSAICheng-Hung YuChin-Kuang LiuKun-Yen Hsu
    • H01L31/0232H01L31/18H01L27/14
    • H01L27/14687H01L27/14636H01L27/14685
    • A method of fabricating an image sensor device is provided. First, a substrate comprising a pixel array region and a pad region is provided. A patterned metal layer and a first planarization layer having an opening exposing the patterned metal layer in the pad region are sequentially formed on the substrate. A color filter array is formed on the first planarization layer in the pixel array region. A second planarization layer is formed to cover the color filter array and filled into the opening. A plurality of microlens is formed above the color filter array on the second planarization layer. A capping layer is conformally formed on the microlens and the second planarization layer. An etching step is performed to remove the capping layer and the second planarization layer in the opening so as to expose the patterned metal layer in the pad region.
    • 提供一种制造图像传感器装置的方法。 首先,提供包括像素阵列区域和衬垫区域的衬底。 图案化金属层和具有露出焊盘区域中的图案化金属层的开口的第一平坦化层依次形成在基板上。 在像素阵列区域中的第一平坦化层上形成滤色器阵列。 形成第二平坦化层以覆盖滤色器阵列并填充到开口中。 在第二平坦化层上的滤色器阵列上方形成多个微透镜。 覆盖层保形地形成在微透镜和第二平坦化层上。 执行蚀刻步骤以去除开口中的覆盖层和第二平坦化层,以暴露焊盘区域中的图案化金属层。
    • 10. 发明授权
    • Reticle alignment procedure
    • 标线校准程序
    • US06936386B2
    • 2005-08-30
    • US10605677
    • 2003-10-17
    • Cheng-Hung Yu
    • Cheng-Hung Yu
    • G01B11/00G03C5/00G03F7/00G03F9/00H01L21/00H01L21/027
    • G03F9/7011G03F9/7019G03F9/7088
    • A semiconductor wafer has at least one pre-layer on-wafer alignment mark (pre-layer on-wafer AM) on a top surface of the semiconductor wafer. A baseline check (BCHK) is performed to align a current-layer reticle AM on a current-layer reticle with the pre-layer on-wafer AM. By capturing and comparing signals of the current-layer reticle AM and the pre-layer on-wafer AM, a corresponding coordinate of the current-layer reticle to the semiconductor wafer is calibrated. Finally, a lithography process is performed to transfer the layout of the current-layer reticle AM to the top surface of the semiconductor wafer to form a corresponding current-layer on-wafer AM.
    • 半导体晶片在半导体晶片的顶表面上具有至少一个晶片上对准标记(晶片上的预层)。 执行基线检查(BCHK)以将当前层掩模版上的当前层标线AM与晶片上的AM前层对准。 通过捕获和比较当前层标线AM和晶片AM上的晶片AM的信号,校准当前层掩模版对半导体晶片的对应坐标。 最后,进行光刻处理以将当前层标线AM的布局转移到半导体晶片的顶表面以形成相应的晶片上的电流层AM。