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1. 发明授权

US08772054B2 Focus control method for photolithography 有权
标题翻译：光刻对焦控制方法
公开(公告)号：US08772054B2
公开(公告)日：2014-07-08
申请号：US13227805
申请日：2011-09-08
申请人： Jen-Pan Wang , Chien-Hsuan Liu , Ching-Hsien Chen , Chao-Chi Chen
发明人： Jen-Pan Wang , Chien-Hsuan Liu , Ching-Hsien Chen , Chao-Chi Chen
IPC分类号： H01L21/66
CPC分类号： G03F7/70641 , G03F7/70341 , G03F9/7026 , G03F9/7034 , G03F9/7053
摘要： A method comprises providing a semiconductor substrate having at least one layer of a material over the substrate. A sound is applied to the substrate, such that a sound wave is reflected by a top surface of the layer of material The sound wave is detected using a sensor. A topography of the top surface is determined based on the detected sound wave. The determined topography is used to control an immersion lithography process.
摘要翻译：一种方法包括提供在衬底上具有至少一层材料的半导体衬底。对基板施加声音，使得声波被材料层的顶表面反射。使用传感器检测声波。基于检测到的声波来确定顶面的形貌。确定的地形用于控制浸没光刻工艺。

2. 发明申请

US20130065328A1 FOCUS CONTROL METHOD FOR PHOTOLITHOGRAPHY 有权
标题翻译：聚焦控制方法
公开(公告)号：US20130065328A1
公开(公告)日：2013-03-14
申请号：US13227805
申请日：2011-09-08
申请人： Jen-Pan WANG , Chien-Hsuan Liu , Ching-Hsien Chen , Chao-Chi Chen
发明人： Jen-Pan WANG , Chien-Hsuan Liu , Ching-Hsien Chen , Chao-Chi Chen
IPC分类号： H01L21/66 , G03B27/52
CPC分类号： G03F7/70641 , G03F7/70341 , G03F9/7026 , G03F9/7034 , G03F9/7053
摘要： A method comprises providing a semiconductor substrate having at least one layer of a material over the substrate. A sound is applied to the substrate, such that a sound wave is reflected by a top surface of the layer of material The sound wave is detected using a sensor. A topography of the top surface is determined based on the detected sound wave. The determined topography is used to control an immersion lithography process.
摘要翻译：一种方法包括提供在衬底上具有至少一层材料的半导体衬底。对基板施加声音，使得声波被材料层的顶表面反射。使用传感器检测声波。基于检测到的声波来确定顶面的形貌。确定的地形用于控制浸没光刻工艺。

3. 发明授权

US08962353B2 System and methods for semiconductor device performance prediction during processing 有权
标题翻译：处理过程中半导体器件性能预测的系统和方法
公开(公告)号：US08962353B2
公开(公告)日：2015-02-24
申请号：US13234964
申请日：2011-09-16
申请人： Jen-Pan Wang , Chao-Chi Chen , Yaling Huang
发明人： Jen-Pan Wang , Chao-Chi Chen , Yaling Huang
IPC分类号： H01L21/66
CPC分类号： H01L22/20 , H01L22/12
摘要： Methods and systems for predicting semiconductor device performance criteria during processing. A method is described that includes receiving a semiconductor wafer; performing semiconductor processing on the semiconductor wafer forming active devices that, when completed, will exhibit a device performance criteria; during the semiconductor processing, measuring in line at least one device performance criteria related physical parameter; projecting an estimated value for the device performance criteria of the active devices using the at least one in line measurement and using estimated measurements for device performance criteria related physical parameters corresponding to later semiconductor processing steps; comparing the estimated value for the device performance criteria to an acceptable range; and determining, based on the comparing, whether the active devices on the semiconductor wafer will have a device performance criteria within the acceptable range. A system for processing semiconductor wafers that includes a programmable processor for performing the methods is described.
摘要翻译：用于在处理过程中预测半导体器件性能标准的方法和系统。描述了一种包括接收半导体晶片的方法; 在形成有源器件的半导体晶片上执行半导体处理，其在完成时将呈现器件性能标准; 在半导体处理期间，测量至少一个器件性能标准相关的物理参数; 使用所述至少一个在线测量来估计所述有源器件的器件性能标准的估计值，并使用对应于后续半导体处理步骤的器件性能标准相关物理参数的估计测量值; 将设备性能标准的估计值与可接受范围进行比较; 以及基于所述比较来确定所述半导体晶片上的有源器件是否将器件性能标准在可接受的范围内。描述了一种用于处理半导体晶片的系统，其包括用于执行该方法的可编程处理器。

4. 发明申请

US20130071957A1 System and Methods for Semiconductor Device Performance Prediction During Processing 有权
标题翻译：半导体器件性能预测的系统和方法
公开(公告)号：US20130071957A1
公开(公告)日：2013-03-21
申请号：US13234964
申请日：2011-09-16
申请人： Jen-Pan Wang , Chao-Chi Chen , Yaling Huang
发明人： Jen-Pan Wang , Chao-Chi Chen , Yaling Huang
IPC分类号： H01L21/66
CPC分类号： H01L22/20 , H01L22/12
摘要： Methods and systems for predicting semiconductor device performance criteria during processing. A method is described that includes receiving a semiconductor wafer; performing semiconductor processing on the semiconductor wafer forming active devices that, when completed, will exhibit a device performance criteria; during the semiconductor processing, measuring in line at least one device performance criteria related physical parameter; projecting an estimated value for the device performance criteria of the active devices using the at least one in line measurement and using estimated measurements for device performance criteria related physical parameters corresponding to later semiconductor processing steps; comparing the estimated value for the device performance criteria to an acceptable range; and determining, based on the comparing, whether the active devices on the semiconductor wafer will have a device performance criteria within the acceptable range. A system for processing semiconductor wafers that includes a programmable processor for performing the methods is described.
摘要翻译：用于在处理过程中预测半导体器件性能标准的方法和系统。描述了一种包括接收半导体晶片的方法; 在形成有源器件的半导体晶片上执行半导体处理，其在完成时将呈现器件性能标准; 在半导体处理期间，测量至少一个器件性能标准相关的物理参数; 使用所述至少一个在线测量来估计所述有源器件的器件性能标准的估计值，并使用对应于后续半导体处理步骤的器件性能标准相关物理参数的估计测量值; 将设备性能标准的估计值与可接受范围进行比较; 以及基于所述比较来确定所述半导体晶片上的有源器件是否将器件性能标准在可接受的范围内。描述了一种用于处理半导体晶片的系统，其包括用于执行该方法的可编程处理器。

5. 发明授权

US07844055B2 Detecting and transporting dynamic presence information over a wireless and wireline communications network 有权
标题翻译：通过无线和有线通信网络检测和传输动态存在信息
公开(公告)号：US07844055B2
公开(公告)日：2010-11-30
申请号：US10180636
申请日：2002-06-25
申请人： Atanu Mukherjee , Francois Frederic Ozog , Chao-Chi Chen
发明人： Atanu Mukherjee , Francois Frederic Ozog , Chao-Chi Chen
IPC分类号： G06F15/16 , H04W4/00 , H04W36/00
CPC分类号： H04L65/103 , H04L29/06 , H04L29/06027 , H04L29/12207 , H04L51/00 , H04L51/04 , H04L51/38 , H04L61/20 , H04L65/1006 , H04L65/104 , H04L65/1043 , H04L67/04 , H04L67/18 , H04L67/24 , H04L67/26 , H04L67/2823 , H04L67/2828 , H04L67/2842 , H04L67/303 , H04L69/08 , H04L69/24 , H04L69/329 , H04W4/02 , H04W4/06 , H04W8/10 , H04W8/183 , H04W8/205 , H04W8/22 , H04W60/04
摘要： A method for detecting and transporting dynamic presence information over a wireless and wireline communications network comprises determining client device capabilities relating to user presence information that may be obtained from the client device and determining a presence configuration of the client device. The presence configuration defines information to be provided to a presence agent. The presence configuration also defines one or more action to be performed upon notification of an event occurrence. The method also includes collecting dynamic presence information based at least in part on the client device capabilities and the presence configuration.
摘要翻译：一种用于通过无线和有线通信网络检测和传送动态存在信息的方法包括确定与可从客户端设备获得的用户存在信息相关的客户端设备能力并确定客户端设备的存在配置。存在配置定义要提供给存在代理的信息。存在配置还定义了在事件发生通知时要执行的一个或多个动作。该方法还包括至少部分地基于客户端设备能力和存在配置来收集动态存在信息。

6. 发明申请

US20050073515A1 Processor module packaging for a portable electronic device display 有权
公开(公告)号：US20050073515A1
公开(公告)日：2005-04-07
申请号：US10874697
申请日：2004-06-22
申请人： Martin Kee , Michael Clarke , Rod Fleck , Chao-Chi Chen , Craig O'Connell , Stephen Perrin
发明人： Martin Kee , Michael Clarke , Rod Fleck , Chao-Chi Chen , Craig O'Connell , Stephen Perrin
IPC分类号： G06F20060101 , G06F1/16 , G09G5/00
CPC分类号： G06F1/1616 , G06F1/1637 , G06F1/1692 , Y10S248/919 , Y10S345/905
摘要： A processor module is packaged with a display for a portable electronic device. The display is designed to create a space within a display housing to allow a processor module to be included in the display housing. The processor module can be designed to be integral with the display housing. Additionally, the processor module can be designed to be detachable from the display housing to provide a removable processor module. The removable processor module can be replaced with another processor module having different functionality or have stand alone functionality, as well as system functionality when attached to a display lid or a portable electronic device.

7. 发明申请

US20050064911A1 User interface for a secondary display module of a mobile electronic device 有权
标题翻译：用于移动电子设备的辅助显示模块的用户界面
公开(公告)号：US20050064911A1
公开(公告)日：2005-03-24
申请号：US10870480
申请日：2004-06-17
申请人： Chao-Chi Chen , Martin Kee , Craig O'Connell , Anne Armstrong , Stephen Perrin
发明人： Chao-Chi Chen , Martin Kee , Craig O'Connell , Anne Armstrong , Stephen Perrin
IPC分类号： G06F1/16 , G06F1/32 , G06F3/033 , G06F3/048 , H04M1/02 , H04M1/725 , H04M1/73 , H04B1/38
CPC分类号： G06F1/1632 , G06F1/1616 , G06F1/1626 , G06F1/1647 , G06F1/3203 , G06F1/3293 , G06F3/0481 , G06F2200/1614 , H04M1/0214 , H04M1/0256 , H04M1/72522 , H04M1/72527 , H04M1/7253 , H04M1/72547 , H04M1/72583 , H04M2250/02 , H04M2250/06 , H04M2250/16 , H04W52/0264 , Y02D10/122 , Y02D70/142 , Y02D70/144 , Y02D70/164
摘要： A user interface (UI) for use with a secondary display module of a mobile electronic device. The UI allows the user to access application data without activating the operating system (OS) of the main portion of the mobile electronic device. The UI can allow the user to access application data by activating the OS and an associated low-power application without launching the application. The UI also provides a simple mechanism to disable wireless components of the mobile electronic device while allowing the user to use other non-wireless components. The secondary display module can be detached from a main portion of the mobile electronic device, with the UI being automatically activated. The UI can be automatically activated (or deactivated) in response to deactivation (or activation) of the UI of the main display of the mobile electronic device.
摘要翻译：用于与移动电子设备的辅助显示模块一起使用的用户界面（UI）。 UI允许用户访问应用数据而不激活移动电子设备的主要部分的操作系统（OS）。 UI可以允许用户通过在不启动应用程序的情况下激活OS和相关联的低功耗应用程序来访问应用程序数据。 UI还提供了一种简单的机制来禁用移动电子设备的无线组件，同时允许用户使用其他非无线组件。辅助显示模块可以从移动电子设备的主要部分分离，UI被自动激活。响应于移动电子设备的主显示器的UI的去激活（或激活），UI可以被自动激活（或去激活）。

8. 发明申请

US20160020825A1 INPUT/OUTPUT SIGNAL PROCESSING CIRCUIT AND INPUT/OUTPUT SIGNAL PROCESSING METHOD 有权
公开(公告)号：US20160020825A1
公开(公告)日：2016-01-21
申请号：US14755686
申请日：2015-06-30
申请人： Yi-Min Shiu , Chao-Chi Chen , Pei-Sheng Tsu
发明人： Yi-Min Shiu , Chao-Chi Chen , Pei-Sheng Tsu
IPC分类号： H04B3/54
CPC分类号： H04B3/54 , G06F1/26 , G06F13/4282 , G09G2300/0408 , G09G2310/0289 , G11C5/14 , G11C11/4074 , G11C11/4096
摘要： The present invention discloses an input/output (I/O) signal processing circuit and processing method. The I/O signal processing circuit includes a level adjustable I/O circuit and an adjustment circuit. The I/O signal processing circuit includes an output driver and/or an input comparator. The output driver transmits an output signal via a signal transmission line according to an output data. The output driver has an adjustable high operation voltage level and an adjustable low operation voltage level, which determine a high level and a low level of the output signal, respectively. The input comparator receives an input signal via the signal transmission line and comparing the input signal with an adjustable reference voltage, so as to generate an input data. The adjustment circuit generates an adjustment signal according to voltage drop related information, to correspondingly adjust the adjustable high and low operation voltage level and/or the adjustable reference voltage.

9. 发明授权

US06995064B2 Halogen gettering method for forming field effect transistor (FET) device 失效
标题翻译：用于形成场效应晶体管（FET）器件的卤素吸除方法
公开(公告)号：US06995064B2
公开(公告)日：2006-02-07
申请号：US10813786
申请日：2004-03-30
申请人： Ching-Chen Hao , Chao-Chi Chen , Chih-Heng Shen , Chi-Hsun Hsieh
发明人： Ching-Chen Hao , Chao-Chi Chen , Chih-Heng Shen , Chi-Hsun Hsieh
IPC分类号： H01L21/00 , H01L21/84 , H01L21/336
CPC分类号： H01L21/28202 , H01L21/28211 , H01L21/823462 , H01L29/513
摘要： A thermal oxidation method for forming a gate dielectric layer for use within a field effect transistor device employs a thermal oxidizing atmosphere comprising a halogen getter material. By employing the halogen getter material, the field effect transistor device is formed with enhanced performance, in particular with respect to negative bias temperature instability lifetime.
摘要翻译：用于形成在场效应晶体管器件内使用的栅极电介质层的热氧化方法采用包含卤素吸气材料的热氧化气氛。通过采用卤素吸气剂材料，场效晶体管器件形成具有增强的性能，特别是相对于负偏压温度不稳定寿命。

10. 发明申请

US20050237702A1 Processor module packaging for a portable electronic device display 有权
公开(公告)号：US20050237702A1
公开(公告)日：2005-10-27
申请号：US11166416
申请日：2005-06-25
申请人： Martin Kee , Michael Clarke , Rod Fleck , Chao-Chi Chen , Craig O'Connell , Stephen Perrin
发明人： Martin Kee , Michael Clarke , Rod Fleck , Chao-Chi Chen , Craig O'Connell , Stephen Perrin
IPC分类号： G06F20060101 , G06F1/16 , G09G5/00
CPC分类号： G06F1/1616 , G06F1/1637 , G06F1/1692 , Y10S248/919 , Y10S345/905
摘要： A processor module is packaged with a display for a portable electronic device. The display is designed to create a space within a display housing to allow a processor module to be included in the display housing. The processor module can be designed to be integral with the display housing. Additionally, the processor module can be designed to be detachable from the display housing to provide a removable processor module. The removable processor module can be replaced with another processor module having different functionality or have stand alone functionality, as well as system functionality when attached to a display lid or a portable electronic device.

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