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    • 2. 发明授权
    • Membrane for use in X-ray mask and method for preparing the same
    • 用于X射线掩模的膜及其制备方法
    • US4940851A
    • 1990-07-10
    • US111996
    • 1987-10-21
    • Akira OyobeToshihiko MaedaHiroyuki NakaeToshio HiraiTsuyoshi Masumoto
    • Akira OyobeToshihiko MaedaHiroyuki NakaeToshio HiraiTsuyoshi Masumoto
    • C01B35/14G03F1/00G03F1/22H01L21/027
    • G03F1/22
    • A membrane for use in an X-ray mask composed of a compound comprising at least three kinds of elements of boron (B), silicon (Si) and nitrogen (N) in which the content of silicon in the compound is at least 15 atomic percent, but less than 100 atomic percent, and the atomic ratio of Si/(B+Si) in the compound is at least 0.2, but less than one. The membrane is synthesized from source gases including at least the foregoing three kinds of elements by chemical reaction under such conditions that the ratio of nitrogen to boron plus silicon is at least one in the source gases and thereby depositing a film of the compound onto a substrate. Since the membrane thus prepared has a high transmittance in the visible region and X-ray and their residual stress can be readily controlled by adjusting the conditions for the formation of the membrane, it is suitable for the preparation of X-ray masks.
    • 一种用于由包含硼(B),硅(Si)和氮(N))的至少三种元素的化合物构成的X射线掩模的膜,其中化合物中的硅含量为至少15原子 百分比但小于100原子%,化合物中Si /(B + Si)的原子比为至少0.2,但小于1。 在源气体中氮与硼与硅的比例至少为1的条件下,通过化学反应在至少包含上述3种元素的源气体中合成膜,由此将化合物的膜沉积在基材上 。 由于如此制备的膜在可见光区域具有高透射率,并且通过调节形成膜的条件可以容易地控制X射线及其残余应力,因此适用于制备X射线掩模。
    • 3. 发明授权
    • High strength and high rigidity aluminum-based alloy
    • 高强度高刚性铝基合金
    • US06017403A
    • 2000-01-25
    • US601949
    • 1996-02-15
    • Tsuyoshi MasumotoAkihisa InoueYuma Horio
    • Tsuyoshi MasumotoAkihisa InoueYuma Horio
    • C22C21/00
    • C22C21/00
    • An aluminum-based alloy having the general formula Al.sub.x L.sub.y M.sub.z (wherein L is Mn or Cr; M is Ni, Co, and/or Cu; and x, y, and z, representing a composition ratio in atomic percentages, satisfy the relationships x+y+z=100, 75.ltoreq.x.ltoreq.95, 2.ltoreq.y.ltoreq.15, and 0.5.ltoreq.z.ltoreq.10) having a metallographic structure comprising a quasi-crystalline phase possesses high strength and high rigidity. In order to enhance the ductility and toughness of the aluminum-based alloy, the atomic percentage of M may be further limited to 0.5.ltoreq.z.ltoreq.4, and more preferably to 0.5.ltoreq.z.ltoreq.3. The aluminum-based alloy is useful as a structural material for aircraft, vehicles and ships, and for engine parts; as material for sashes, roofing materials, and exterior materials for use in construction; or as materials for use in marine equipment, nuclear reactors, and the like.
    • 具有通式AlxLyMz(其中L是Mn或Cr; M是Ni,Co和/或Cu;和表示原子百分比的组成比的x,y和z)的铝基合金满足关系x + 具有包含准结晶相的金相组织的y + z = 100,75,或者= x,y = x,z = 100,75
    • 9. 发明授权
    • Sacrificial electrode material for corrosion prevention
    • 用于防腐的牺牲电极材料
    • US5423969A
    • 1995-06-13
    • US217009
    • 1994-03-23
    • Tsuyoshi MasumotoAkihisa InoueTakashi SakumaToshisuke Shibata
    • Tsuyoshi MasumotoAkihisa InoueTakashi SakumaToshisuke Shibata
    • C22C23/00C22C45/00C23F13/00C23F13/14C25B11/04
    • C23F13/14
    • The present invention provides a sacrificial electrode material which consists of a single phase amorphous structure or a structure consisting of an amorphous phase and a crystalline solid solution phase and provides electrochemical corrosion protection to metallic articles exposed to an aqueous electrolytic solution. The electrode material is prepared by rapidly quenching a magnesium-based alloy material from the liquid phase or vapor phase thereof, the magnesium-based alloy material consisting the general formula: Mg.sub.bal X1.sub.a X2.sub.b or Mg.sub.bal X1.sub.a, wherein X1 is at least one element selected from the group consisting of Al, Zn, Ga, Ca and In; X2 is at least one element selected from the group consisting of Mm (misch metal), Y and rare earth metal elements; a and b are, in atomic percentages, 5.0.ltoreq.a.ltoreq.35.0 and 3.0.ltoreq.b.ltoreq.25.0, respectively. The magnesium-based alloy material may further contain one or more transition metal elements in their total contents not exceeding 1.0 atomic %.
    • 本发明提供一种牺牲电极材料,其由单相无定形结构或由非晶相和结晶固溶体相组成的结构组成,并且对暴露于水性电解液的金属制品提供电化学腐蚀保护。 通过从其液相或气相快速淬火镁基合金材料制备电极材料,镁基合金材料由以下通式组成:MgbalX1aX2b或MgbalX1a,其中X1是选自以下的至少一种元素: 的Al,Zn,Ga,Ca和In; X2是选自由Mm(混合稀土金属),Y和稀土金属元素组成的组中的至少一种元素; a和b分别为原子百分比为5.0