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    • 7. 发明专利
    • Device for the production of silicon crystals from electrically conductive melts, exhibits crucible having melt arranged in growth chamber, heating arrangement surrounding the crucible, and power supply unit arranged outsides of the chamber
    • DE102007020239A1
    • 2007-10-25
    • DE102007020239
    • 2007-04-24
    • FORSCHUNGSVERBUND BERLIN EV
    • ZIEM MARIORUDOLPH PETERLANGE RALPH-PETER
    • C30B15/14C30B11/00C30B15/22C30B30/04
    • The device for the production of silicon crystals from electrical conductive melts, exhibits a crucible (20) having melt (22) arranged in a growth chamber (23), a heating arrangement (24) surrounding the crucible, and a power supply unit arranged outsides of the chamber. The power supply unit stands in connection with a controller, which stands in connection with power modules. The heating arrangement is implemented as a multi coil arrangement, which controls three connections that are led through the growth chamber. The device for the production of silicon crystals from electrical conductive melts, exhibits a crucible (20) having melt (22) arranged in a growth chamber (23), a heating arrangement (24) surrounding the crucible, and a power supply unit arranged outsides of the chamber. The power supply unit stands in connection with a controller, which stands in connection with power modules. The heating arrangement is implemented as a multi coil arrangement, which controls three connections that are led through the growth chamber. The first power module is connected with coils of heating arrangement by the connections (7, 9) and the second power is connected with coils of heating arrangement by other connections (8, 9). The power modules are connected with an absolute measurement at outside of the chamber. The multi coil arrangement is connected with the energy supply unit on outsides of the growth chamber and is constructed out of any integral coil numbers. The coils show infinitely variable spiral windings and are connected in series connection and/or parallel connection with one another. The controller arranged outside of the growth chamber, comprises a pulse-width modulator for controlling the power module, a low pass for the filtration of frequencies, a sinus voltage generator, a phase modifier for the generation of phase displacements, a measuring unit for measuring flow- and voltage measurement values and a data processing system for monitoring control operations. The data processing system is arranged as the pulse-width modulator. The power modules stand in connection with the low pass, the measuring unit and the data processing unit.