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    • 6. 发明授权
    • Apparatus for forming thin film using microwave and method therefor
    • 使用微波形成薄膜的设备及其方法
    • US06384390B1
    • 2002-05-07
    • US09663418
    • 2000-09-15
    • Sun-tae JungDong-wook ShinHyoun-soo Kim
    • Sun-tae JungDong-wook ShinHyoun-soo Kim
    • H05B664
    • H01L21/67248C23C16/453C23C16/56H01L21/02164H01L21/02271H01L21/02345H01L21/02356H01L21/316H01L21/31612H01L21/67115
    • An apparatus for forming a thin film using microwave and a method therefor are provided. The apparatus for forming a thin film on a wafer by densifying predetermined soot on a wafer, when the wafer and the soot form a sample, includes a microwave sintering furnace for sealing the sample and exposing the sample to microwave, thus sintering the sample, a sintering furnace atmosphere maker for controlling the state, being the atmosphere of air inside the microwave sintering furnace, a temperature sensor/controller for sensing a temperature inside the microwave sintering furnace, comparing the temperature with a predetermined reference temperature, and outputting an error temperature, and a microwave power source for generating microwave of a predetermined temperature with reference to the error temperature output from the temperature sensor/controller and applying the microwave to the microwave sintering furnace. It is possible to rapidly form a film of a fine and uniform structure by densification using microwave.
    • 提供一种使用微波形成薄膜的装置及其方法。 当晶片和烟灰形成样品时,通过致密化晶片上的预定烟灰来在晶片上形成薄膜的装置包括用于密封样品并将样品暴露于微波的微波烧结炉,从而烧结样品, 用于控制状态的烧结炉气氛制造商,微波烧结炉内的空气气氛,用于感测微波烧结炉内的温度的温度传感器/控制器,将温度与预定的参考温度进行比较,并输出误差温度, 以及微波电源,用于根据从温度传感器/控制器输出的误差温度产生预定温度的微波,并将微波施加到微波烧结炉。 可以通过使用微波的致密化快速形成精细且均匀结构的膜。
    • 8. 发明授权
    • Ge-Ga-S-based glass composition having light amplifying characteristic
and apparatus for optical communications using the same
    • 具有光放大特性的Ge-Ga-S系玻璃组合物及使用其的光通信装置
    • US6148125A
    • 2000-11-14
    • US185734
    • 1998-11-04
    • Jong HeoYong-beom ShinSe-ho ParkDong-wook ShinHyoun-soo Kim
    • Jong HeoYong-beom ShinSe-ho ParkDong-wook ShinHyoun-soo Kim
    • C03C3/00C03C3/32H01S3/16H01S3/17G02B6/26
    • H01S3/17C03C3/323H01S3/1603H01S3/1613
    • A Ge--Ga--S-based glass composition having light amplifying characteristics and an apparatus for optical communications using the glass composition are provided. The present invention includes a sulfur-poor Ge--Ga--S based host glass which includes less S than compositions on the composition line of GeS.sub.2 --G.sub.2 S.sub.3 on the ternary phase diagram of Ge--Ga--S, and a rare earth active material doped on the host glass for luminescence and light amplification. Ga of no more than about 10 mol % is included in the host glass. Also, Pr.sup.3+ ions are used as the rare earth active material. Furthermore, for stable vitrification and a blue shift of a short wavelength absorption band, a vitrification stabilizer such as Br and I is added to the host glass. Also, the present invention includes an apparatus for performing optical communications such as a light amplifier using optical fiber comprised of the glass composition including the S-poor Ge--Ga--S host glass which includes less S than a glass on a composition line of GeS.sub.2 --Ga.sub.2 S.sub.3 and the rare earth active material doped on the host glass for the light amplification.
    • 提供了具有光放大特性的Ge-Ga-S系玻璃组合物和使用该玻璃组合物的光通信装置。 本发明包括在Ge-Ga-S三元相图上包含比GeS2-G2S3组成线上的组合少的S的贫硫Ge-Ga-S基主体玻璃,以及掺杂在 主机玻璃用于发光和光放大。 不超过约10mol%的Ga包含在主体玻璃中。 此外,Pr3 +离子用作稀土活性物质。 此外,为了稳定的玻璃化和短波长吸收带的蓝移,将玻璃化稳定剂如Br和I加入到主体玻璃中。 此外,本发明还包括一种用于执行光通信的装置,例如使用由玻璃组合物构成的光放大器的装置,所述玻璃组合物包括S型不良Ge-Ga-S主体玻璃,该玻璃组合物在GeS2的组成线上包括少于玻璃的S -Ga 2 S 3和掺杂在主体玻璃上的稀土活性材料用于光放大。