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    • 1. 发明申请
    • SPUTTER TARGET
    • 射击目标
    • WO2011102896A1
    • 2011-08-25
    • PCT/US2011/000285
    • 2011-02-16
    • TOSOH SMD, INC.IVANOV, Eugene, Y.LEYBOVICH, AlexanderRIZER, John
    • IVANOV, Eugene, Y.LEYBOVICH, AlexanderRIZER, John
    • C23C14/34
    • C23C14/3407H01J37/3423H01J37/3426H01J37/3435Y10T29/49826
    • In one aspect of the invention, a sputter target is provided comprising a backing plate (40) comprising a front surface and a back surface; and a sputtering plate mounted on said backing plate, the sputtering plate comprising a sputtering surface and a back surface. At least one of the back surface of the sputtering plate, the front surface of the backing plate, or the back surface of the backing plate has at least one groove (30) that is shaped and sized to correspond to an observed region of higher sputtering of the sputtering plate relative to an adjacent area of the sputtering plate. An insert (50) is placed in the groove (s). The backing plate comprises a first material, the sputtering plate comprises a second material, and an insert comprises a third material. In yet another aspect of the sputter target, a method of controlling the electromagnetic properties of a sputter target is provided.
    • 在本发明的一个方面,提供一种溅射靶,其包括一个包括前表面和后表面的背板(40) 以及安装在所述背板上的溅射板,所述溅射板包括溅射表面和背面。 溅射板的后表面,背板的前表面或背板的后表面中的至少一个具有至少一个凹槽(30),其形状和尺寸被设计成对应于较高溅射的观察区域 的溅射板相对于溅射板的相邻区域。 插入件(50)放置在凹槽中。 背板包括第一材料,溅射板包括第二材料,并且插入件包括第三材料。 在溅射靶的另一方面,提供了一种控制溅射靶的电磁特性的方法。
    • 3. 发明申请
    • CHANNEL-SELECTIVE RF POWER SENSOR
    • 频道选择性射频功率传感器
    • WO2016201453A1
    • 2016-12-15
    • PCT/US2016/037291
    • 2016-06-13
    • BIRD TECHNOLOGIES GROUP, INC.
    • DUMMERMUTH, MartinKLIS, JeffreyHOLT, Timohty, L.WASHELL, John
    • G01R21/01G01R23/163H04B17/309
    • G01R23/163G01R21/01G01R27/06H04B17/318
    • Disclosed is a channel-selective RF power sensor having a coupler and a channel-selective power measurement circuit. The said coupler is configured to obtain a sample of energy travelling on a main transmission line and provide the sample of energy to the channel-selective power measurement circuit. The sample of energy has a channel of interest. The channel-selective power measurement circuit is configured to measure RF energy information for the channel of interest in the sample of energy. Also disclosed is a method of measuring RF energy information for a channel of interest. The method includes providing a channel-selective RF power sensor and a main transmission line and obtaining a sample of energy from the main transmission line using a coupler of the channel-selective RF power sensor.
    • 公开了一种具有耦合器和通道选择功率测量电路的通道选择性RF功率传感器。 所述耦合器被配置为获得在主传输线上行进的能量样本,并将能量样本提供给通道选择性功率测量电路。 能量样本有一个兴趣的渠道。 通道选择性功率测量电路被配置为测量能量样本中感兴趣的信道的RF能量信息。 还公开了一种测量感兴趣信道的RF能量信息的方法。 该方法包括提供频道选择性RF功率传感器和主传输线,并使用频道选择性RF功率传感器的耦合器从主传输线获得能量采样。