发明申请
WO2022245208A1 SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLATE QUALIFICATION TOOL
审中-公开
基本信息:
- 专利标题： SYSTEM FOR PERFORMING ATOMIC FORCE MICROSCOPY, INCLUDING A GRID PLATE QUALIFICATION TOOL
- 申请号：PCT/NL2022/050265 申请日：2022-05-18
- 公开(公告)号：WO2022245208A1 公开(公告)日：2022-11-24
- 发明人： SADEGHIAN MARNANI, Hamed , TOACSEN, Ioan-Andrei
- 申请人： NEARFIELD INSTRUMENTS B.V.
- 申请人地址： Vareseweg 5
- 专利权人： NEARFIELD INSTRUMENTS B.V.
- 当前专利权人： NEARFIELD INSTRUMENTS B.V.
- 当前专利权人地址： Vareseweg 5
- 代理机构： WITMANS, H.A.
- 优先权： NL2028248 2021-05-19
- 主分类号： G01Q30/06
- IPC分类号： G01Q30/06 ; G01Q40/02
摘要：
An atomic force microscopy tool (AFM) configured for receiving a plate including a coordinate reference pattern on the plate, for providing a position reference for the AFM; and a device for qualifying a coordinate reference pattern in the AFM, comprising a fixed reference frame, a pattern encoder for reading the reference pattern, an actuation stage for relatively moving the plate and the pattern encoder parallel to the plate, a displacement measurement system for measuring a displacement of the plate or pattern encoder relative to the fixed reference frame, and a controller for controlling the actuation stage, the encoder, and the measurement system, arranged to identify imperfections in the coordinate reference pattern and their locations by controlling the displacement measurement system; and arranged for storing each imperfection coupled to the location determined.
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01Q | 扫描探针技术或设备；扫描探针技术的应用，例如，扫描探针显微术 |
| ------G01Q30/00 | 用于辅助或改进扫描探针技术或设备的辅助手段，例如显示或数据处理装置 |
| --------G01Q30/04 | .显示或数据处理装置 |
| ----------G01Q30/06 | ..用于误差补偿 |