基本信息:
- 专利标题： A METHOD FOR CALIBRATING OPTICAL COATING APPARATUSES
- 申请号：PCT/US2021/031520 申请日：2021-05-10
- 公开(公告)号：WO2022240385A1 公开(公告)日：2022-11-17
- 发明人： MURPHY, Daragh, John , ROLLINS, Jr., Don
- 申请人： CARL ZEISS VISION INTERNATIONAL GMBH , CARL ZEISS VISION INC.
- 申请人地址： Turnstr. 27; 12121 Scripps Summit Drive
- 专利权人： CARL ZEISS VISION INTERNATIONAL GMBH,CARL ZEISS VISION INC.
- 当前专利权人： CARL ZEISS VISION INTERNATIONAL GMBH,CARL ZEISS VISION INC.
- 当前专利权人地址： Turnstr. 27; 12121 Scripps Summit Drive
- 代理机构： HASSELMANN, Georg
- 主分类号： G02B1/10
- IPC分类号： G02B1/10 ; C23C14/54 ; C23C14/547 ; C23C16/52
摘要：
The invention relates to a computer-implemented method (20) of generating data for calibrating optical coating apparatuses (12) configured to apply optical coatings to surfaces of substrates: the invention is characterized by comparing (26) the measured spectral data of a test optical coating applied by an optical coating apparatus to a surface of a substrate to target specification data for the test optical coating for the optical coating apparatus and determining (28) correction factors for the process parameters of the optical coating apparatus for correcting deviations to the target specification data for the optical coating apparatus based on the comparison of the measured spectral data and the target specification data.
公开/授权文献:
- WO2022240385A8 A METHOD FOR CALIBRATING OPTICAL COATING APPARATUSES 公开/授权日：2022-11-17
IPC结构图谱:
| G | 物理 |
| --G02 | 光学 |
| ----G02B | 光学元件、系统或仪器 |
| ------G02B1/00 | 按制造材料区分的光学元件；用于光学元件的光学涂层 |
| --------G02B1/10 | .对光学元件表面涂覆或对它进行表面处理后所产生的光学涂层 |