基本信息:
- 专利标题： RETICLE EXCHANGE DEVICE WITH RETICLE LEVITATION
- 申请号：PCT/US2021/059099 申请日：2021-11-12
- 公开(公告)号：WO2022104028A1 公开(公告)日：2022-05-19
- 发明人： TRUMPER, David, L. , BHUSHAN, Brij, Mohan
- 申请人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- 申请人地址： 77 Massachusetts Avenue
- 专利权人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- 当前专利权人： MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- 当前专利权人地址： 77 Massachusetts Avenue
- 代理机构： MILMAN, Seth, A. et al.
- 优先权： US63/113,438 2020-11-13
- 主分类号： B23Q3/15
- IPC分类号： B23Q3/15 ; B65G49/07 ; H01L21/683 ; H01L21/687
摘要：
An electrostatic chuck includes electrodes to clamp a workpiece, electrodes to electrostatically levitate and position the workpiece, and sensors to detect position and orientation of the workpiece. Lateral motion of the workpiece relative to the electrostatic chuck can be damped prior to clamping.