基本信息:
- 专利标题： SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS
- 申请号：PCT/US2020/058484 申请日：2020-11-02
- 公开(公告)号：WO2021112991A1 公开(公告)日：2021-06-10
- 发明人： KAPOOR, Sunil , MAROHL, Dan , LINGAMPALLI, Ramkishan Rao , MADSEN, Eric
- 申请人： LAM RESEARCH CORPORATION
- 申请人地址： 4650 Cushing Parkway
- 专利权人： LAM RESEARCH CORPORATION
- 当前专利权人： LAM RESEARCH CORPORATION
- 当前专利权人地址： 4650 Cushing Parkway
- 代理机构： WIGGINS, Michael D.
- 优先权： US62/944,441 2019-12-06
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; C23C16/46 ; C23C16/509 ; H01J37/32
摘要：
A substrate support including a body, a heating element, a first radio frequency filter, and a second radio frequency filter. The body is configured to support a substrate. The heating element is at least partially implemented in a first portion of the body. The first radio frequency filter is connected to an input of the heating element and at least partially implemented in a second portion of the body and connected to the heating element by a first via. The second radio frequency filter is connected to an output of the heating element and at least partially implemented in the second portion or a third portion of the body.