发明申请
WO2020160852A1 ELECTRONIC SYSTEM, ACCELEROMETER, CALIBRATION METHOD, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
审中-公开
基本信息:
- 专利标题： ELECTRONIC SYSTEM, ACCELEROMETER, CALIBRATION METHOD, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- 申请号：PCT/EP2020/050051 申请日：2020-01-03
- 公开(公告)号：WO2020160852A1 公开(公告)日：2020-08-13
- 发明人： BUTLER, Hans , JANSEN, Bas , DE HOON, Cornelius, Adrianus, Lambertus
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： P.O. Box 324 5500 AH Veldhoven NL
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： P.O. Box 324 5500 AH Veldhoven NL
- 代理机构： KRUK, Arno
- 优先权： EP19155204.1 20190204
- 主分类号： G01P15/09
- IPC分类号： G01P15/09 ; G01P21/00 ; G03F7/20 ; G01D3/032
摘要：
The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: - receive an acceleration signal from the piezoelectric element; - electronically dampen an amplitude of the first mechanical resonance frequency; and - generate a damped acceleration signal, b) an extender configured to: - receive the damped acceleration signal; - extend the frequency response; and - output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01P | 线速度或角速度、加速度、减速度或冲击的测量；运动的存在、不存在或方向的指示 |
| ------G01P15/00 | 测量加速度；测量减速度；测量冲击即加速度的突变 |
| --------G01P15/02 | .利用惯性力 |
| ----------G01P15/04 | ..用于指示最大值 |
| ------------G01P15/09 | ...应用压电变送器 |