基本信息:
- 专利标题: MICROELECTRONIC SENSOR FOR AIR QUALITY MONITORING
- 专利标题(中):用于空气质量监测的微电子传感器
- 申请号:PCT/IB2017/051325 申请日:2017-03-07
- 公开(公告)号:WO2017153909A1 公开(公告)日:2017-09-14
- 发明人: RAM, Ayal , LICHTENSTEIN, Amir
- 申请人: RG INNOVATIONS PTE LTD
- 申请人地址: 100 Tras Street, #16-01 100 AM 079027 Singapore SG
- 专利权人: RG INNOVATIONS PTE LTD
- 当前专利权人: RG INNOVATIONS PTE LTD
- 当前专利权人地址: 100 Tras Street, #16-01 100 AM 079027 Singapore SG
- 优先权: US15/067,093 20160310; US15/157,285 20160517; US62/362,167 20160714
- 主分类号: H01L29/00
- IPC分类号: H01L29/00 ; G01N27/414
摘要:
In some embodiments, a microelectronic sensor includes an open-gate pseudo-conductive high-electron mobility transistor and used for air quality monitoring. The transistor comprises a substrate, on which a multilayer hetero-junction structure is deposited. This hetero-junction structure comprises a buffer layer and a barrier layer, both grown from III-V single-crystalline or polycrystalline semiconductor materials. A two-dimensional electron gas (2DEG) conducting channel is formed at the interface between the buffer and barrier layers and provides electron current in the system between source and drain electrodes. The source and drain contacts are non-ohmic (capacitively-coupled) and connected to the formed 2DEG channel and to the electrical metallizations, the latter are placed on top of the transistor and connect it to the sensor system. The metal gate electrode is placed between the source and drain areas on or above the barrier layer, which may be recessed or grown to a specific thickness. An optional dielectric layer is deposited on top of the barrier layer.
摘要(中):
在一些实施例中,微电子传感器包括开路栅极伪导电高电子迁移率晶体管并用于空气质量监测。 晶体管包括衬底,在衬底上沉积多层异质结结构。 该异质结结构包括均由III-V单晶或多晶半导体材料生长的缓冲层和阻挡层。 在缓冲层和阻挡层之间的界面处形成二维电子气(2DEG)传导沟道,并且在源极和漏极之间的系统中提供电子电流。 源极和漏极触点是非欧姆(电容耦合)并连接到形成的2DEG通道和电气金属,后者放置在晶体管的顶部并将其连接到传感器系统。 金属栅极电极放置在阻挡层上或上方的源极和漏极区域之间,其可以凹陷或生长至特定厚度。 可选的电介质层沉积在阻挡层的顶部。 p>