基本信息:
- 专利标题: THREE-DIMENSIONAL NANOSTRUCTURE, AND PREPARATION METHOD THEREOF
- 专利标题(中):三维纳米结构及其制备方法
- 申请号:PCT/KR2011004735 申请日:2011-06-29
- 公开(公告)号:WO2012002717A2 公开(公告)日:2012-01-05
- 发明人: JUNG HEE TAE , JEON HWAN-JIN , KIM KYOUNG-HWAN , BAEK YOUN-KYOUNG
- 申请人: KOREA ADVANCED INST SCI & TECH , JUNG HEE TAE , JEON HWAN-JIN , KIM KYOUNG-HWAN , BAEK YOUN-KYOUNG
- 专利权人: KOREA ADVANCED INST SCI & TECH,JUNG HEE TAE,JEON HWAN-JIN,KIM KYOUNG-HWAN,BAEK YOUN-KYOUNG
- 当前专利权人: KOREA ADVANCED INST SCI & TECH,JUNG HEE TAE,JEON HWAN-JIN,KIM KYOUNG-HWAN,BAEK YOUN-KYOUNG
- 优先权: KR20100062183 2010-06-29
- 主分类号: B82B3/00
- IPC分类号: B82B3/00 ; B82B1/00
摘要:
The present invention relates to a three-dimensional nanostructure, and a preparation method thereof, and more specifically, to various shapes of three-dimensional nanostructures having a large area, a high aspect ratio and uniformity prepared by forming an objective material-polymer composite structure in which an objective material is adhered to the outer circumferential surface of a patterned polymer structure by applying ion bombardment through a physical ion etching process, and removing the polymer of the objective material-polymer composite structure, and a preparation method thereof. According to the present invention, the preparation method of a three-dimensional nanostructure can prepare a three-dimensional nanostructure having a high aspect ratio and uniformity through a simple low cost process by applying ion bombardment through a physical ion etching process, and can easily prepare various shapes of structures and can form a uniform nanostructure having a large area and a thickness of 10 nm or less by controlling the pattern and shape of a polymer structure at the same time. Therefore, it is possible to implement the high performance of a future nano-device such as a nano electronic device, an optical device, a bio-device, an energy device, and the like.
摘要(中):
本发明涉及三维纳米结构及其制备方法,更具体地说,涉及通过形成目标材料 - 聚合物复合结构而制备的具有大面积,高纵横比和均匀度的各种形状的三维纳米结构 其中通过物理离子蚀刻工艺施加离子轰击并除去目标材料 - 聚合物复合结构的聚合物,其中目标材料附着到图案化聚合物结构的外周表面及其制备方法。 根据本发明,三维纳米结构体的制备方法可以通过简单的低成本方法通过物理离子蚀刻工艺进行离子轰击,制备具有高纵横比和均匀性的三维纳米结构,并且可以容易地制备 可以通过同时控制聚合物结构的图案和形状,形成具有大面积和厚度为10nm以下的均匀纳米结构的各种形状的结构。 因此,可以实现纳米电子器件,光学器件,生物器件,能量器件等未来的纳米器件的高性能。
IPC结构图谱:
B | 作业;运输 |
--B82 | 超微技术 |
----B82B | 超微结构;超微结构的制造或处理 |
------B82B3/00 | 超微结构的制造或处理 |