发明申请
WO2009127272A1 MASK SUPPORT, MASK ASSEMBLY, AND ASSEMBLY COMPRISING A MASK SUPPORT AND A MASK
审中-公开
基本信息:
- 专利标题： MASK SUPPORT, MASK ASSEMBLY, AND ASSEMBLY COMPRISING A MASK SUPPORT AND A MASK
- 专利标题（中）：MASK支持，MASK大会和组装包括一个MASK支持和一个MASK
- 申请号：PCT/EP2008/066516 申请日：2008-12-01
- 公开(公告)号：WO2009127272A1 公开(公告)日：2009-10-22
- 发明人： LANDGRAF, Heike , SCHÜSSLER, Uwe , BANGERT, Stefan
- 申请人： APPLIED MATERIALS INC. - A CORPORATION OF THE STATE OF DELAWARE , LANDGRAF, Heike , SCHÜSSLER, Uwe , BANGERT, Stefan
- 申请人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 专利权人： APPLIED MATERIALS INC. - A CORPORATION OF THE STATE OF DELAWARE,LANDGRAF, Heike,SCHÜSSLER, Uwe,BANGERT, Stefan
- 当前专利权人： APPLIED MATERIALS INC. - A CORPORATION OF THE STATE OF DELAWARE,LANDGRAF, Heike,SCHÜSSLER, Uwe,BANGERT, Stefan
- 当前专利权人地址： 3050 Bowers Avenue Santa Clara, California 95054 US
- 代理机构： LERMER, Christoph et al.
- 优先权： EP08103619.6 20080418; US61/046,133 20080418; EP08165689.4 20081002; US12/244,488 20081002
- 主分类号： C23C14/04
- IPC分类号： C23C14/04
摘要：
A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.
摘要（中）：
面罩支撑件10包括框架元件20和弹性元件30.弹性元件30固定到框架元件20.弹性元件30是由柔性材料整体形成的部件。 它包括杠杆或臂部分37，其具有从臂部分37的自由端以大约90°的角度延伸的第一接合突出部38。 由薄金属箔制成，以及连接元件42.连接元件42包括用于与弹性元件30的接合突起38接合的接合部分43.掩模41可以附着/拉伸到掩模支撑件10以及 以便从面罩支撑件10舒适地脱离。