发明申请
WO2007145265A1 METHOD AND SYSTEM FOR BRINGING IN/OUT OF SUBSTRATE, AND PHOTOSENSITIVE LAMINATE MANUFACTURING APPARATUS
审中-公开
基本信息:
- 专利标题： METHOD AND SYSTEM FOR BRINGING IN/OUT OF SUBSTRATE, AND PHOTOSENSITIVE LAMINATE MANUFACTURING APPARATUS
- 专利标题（中）：用于衬底的输入/输出方法和系统，以及感光层压制造装置
- 申请号：PCT/JP2007/061956 申请日：2007-06-07
- 公开(公告)号：WO2007145265A1 公开(公告)日：2007-12-21
- 发明人： SUGIHARA, Ryoichi , MORI, Ryo
- 申请人： FUJIFILM CORPORATION , SUGIHARA, Ryoichi , MORI, Ryo
- 申请人地址： 26-30, Nishiazabu 2-chome, Minato-ku, Tokyo 1068620 JP
- 专利权人： FUJIFILM CORPORATION,SUGIHARA, Ryoichi,MORI, Ryo
- 当前专利权人： FUJIFILM CORPORATION,SUGIHARA, Ryoichi,MORI, Ryo
- 当前专利权人地址： 26-30, Nishiazabu 2-chome, Minato-ku, Tokyo 1068620 JP
- 代理机构： KOBAYASHI, Kazunori et al.
- 优先权： JP2006-163248 20060613
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
A substrate cooling section (30) is provided downstream from a bonding section (29) which bonds a photosensitive web (7) to a glass substrate (3) so as to produce a bonded substrate (20). The substrate cooling section (30) includes a bonded substrate stocker (68) having a plurality of substrate storage chambers (76) each of which stores the bonded substrate (20), and a bring in/out robot (69) which brings uncooled bonded substrates (20) from the bonding section into the bonded substrate stocker (68) while bringing out and conveying cooled bonded substrates (20) from the bonded substrate stockers (68) to a base peeling section (31). All the substrate storage chambers (76) are separated into either a normal storage area or a buffer area. When the base peeling section (31) falls into trouble, the substrates at a substrate heating section (28) and the bonding section (29) are stored in the buffer area.
摘要（中）：
衬底冷却部分（30）设置在将感光纤维网（7）粘接到玻璃衬底（3）上的接合部分（29）的下游，以便产生键合衬底（20）。 衬底冷却部分（30）包括具有多个存储接合衬底（20）的多个衬底存储室（76）的接合衬底存放器（68）和带有未粘合的粘合的引入/取出机器人（69） 同时从被粘合的基材储存器（68）向底部剥离部分（31）输送并输送冷却的粘合的基材（20）并将粘合部分的基材（20）从接合部分转移到粘合的基材储存器（68）中。 所有的基板存储室（76）被分离成正常存储区域或缓冲区域。 当基底剥离部分（31）出现故障时，衬底加热部分（28）和接合部分（29）的基板被存储在缓冲区域中。