发明申请
WO2007041232A3 6K PULSE REPETITION RATE AND ABOVE GAS DISCHARGE LASER SYSTEM SOLID STATE PULSE POWER SYSTEM IMPROVEMENTS
审中-公开
基本信息:
- 专利标题： 6K PULSE REPETITION RATE AND ABOVE GAS DISCHARGE LASER SYSTEM SOLID STATE PULSE POWER SYSTEM IMPROVEMENTS
- 申请号：PCT/US2006/037884 申请日：2006-09-27
- 公开(公告)号：WO2007041232A3 公开(公告)日：2007-04-12
- 发明人： HUANG, Chaofeng , MELCHER, Paul, C. , NESS, Richard, M.
- 申请人： CYMER, INC. , HUANG, Chaofeng , MELCHER, Paul, C. , NESS, Richard, M.
- 申请人地址： (A NEVADA CORPORATION) 17075 Thornmint Court San Diego, CA 92127-2413 US
- 专利权人： CYMER, INC.,HUANG, Chaofeng,MELCHER, Paul, C.,NESS, Richard, M.
- 当前专利权人： CYMER, INC.,HUANG, Chaofeng,MELCHER, Paul, C.,NESS, Richard, M.
- 当前专利权人地址： (A NEVADA CORPORATION) 17075 Thornmint Court San Diego, CA 92127-2413 US
- 代理机构： CRAY William c.
- 优先权： US11/241,850 20050929; US60/733,052 20051102; US11/300,979 20051215
- 主分类号： H01S3/22
- IPC分类号： H01S3/22
摘要：
A method and apparatus for operating a very high repetition gas discharge laser system magnetic switch pulsed power system is disclosed, which may comprise a solid state switch, a charging power supply electrically connected to one side of the solid state switch; a charging inductor electrically connected to the other side of the solid state switch; a deque circuit electrically in parallel with the solid state switch comprising a deque switch; a peaking capacitor electrically connected to the charging inductor, a peaking capacitor charging control system operative to charge the peaking capacitor by opening the deque switch and leaving the solid state switch open and then shutting the solid state switch. The solid state switch may comprise a plurality of solid state switches electrically in parallel.