基本信息:
- 专利标题: LASER-BASED TERMINATION OF PASSIVE ELECTRONIC COMPONENTS
- 专利标题(中):被动电子元件的基于激光器的终止
- 申请号:PCT/US2004036962 申请日:2004-11-04
- 公开(公告)号:WO2005045521A2 公开(公告)日:2005-05-19
- 发明人: SWENSON EDWARD J , GARCIA DOUGLAS J , GOLDWATER BRUCE STUART
- 申请人: ELECTRO SCIENT IND INC , SWENSON EDWARD J , GARCIA DOUGLAS J , GOLDWATER BRUCE STUART
- 专利权人: ELECTRO SCIENT IND INC,SWENSON EDWARD J,GARCIA DOUGLAS J,GOLDWATER BRUCE STUART
- 当前专利权人: ELECTRO SCIENT IND INC,SWENSON EDWARD J,GARCIA DOUGLAS J,GOLDWATER BRUCE STUART
- 优先权: US51837803 2003-11-04
- 主分类号: G03F
- IPC分类号: G03F20060101 ; G11C5/06 ; H01C17/00 ; H01C17/242 ; H01C17/28 ; H01G4/232 ; H01G4/33 ; H01G13/00 ; G03F
摘要:
Terminating the ends of passive electronic components entails applying a laser-ablative coating (70) to each of the opposed major surfaces (14 and 16; 36 and 38) of a substrate (10 and 34). A UV laser beam having a spot size and an energy distribution sufficient to remove the laser-ablative coating from multiple selected regions of the major surfaces is directed for incidence on the substrate. Relative motion between the UV laser beam and substrate effects removal of sufficient amounts of laser-ablative coating to expose the multiple selected regions of the opposed major surfaces. The substrate is then broken into multiple rowbars (48 and 50), each of which includes side margins (60 and 62) along which are positioned different spatially aligned pairs of the selected regions of the opposed major surfaces. An electrically conductive material is applied to the side margins to form electrically conductive interconnects (56 and 58) between each spatially aligned pair of the selected regions.
摘要(中):
终止无源电子部件的端部需要将激光烧蚀涂层(70)施加到衬底(10和34)的每个相对主表面(14和16; 36和38)上。 具有足以从主表面的多个选定区域去除激光烧蚀涂层的光斑尺寸和能量分布的UV激光束被引导到基底上。 UV激光束和衬底之间的相对运动消除了足够量的激光烧蚀涂层以暴露相对主表面的多个选定区域。 然后将衬底分成多个行(48和50),每个行包括侧边缘(60和62),沿着该边缘位于相对主表面的选定区域的不同的空间对准的对上。 将导电材料施加到侧边缘,以在每个空间对准的选定区域对之间形成导电互连(56和58)。