基本信息:
- 专利标题: SUBSTRATE CARRIER FOR ELECTROPLATING SOLAR CELLS
- 专利标题(中):电镀太阳能电池基板载体
- 申请号:PCT/US2004025423 申请日:2004-08-06
- 公开(公告)号:WO2005029540A3 公开(公告)日:2006-02-16
- 发明人: PAVANI LUCA , KAMINAR NEIL , URALWONG PONGSTHORN , PHU THOMAS , ROSE DOUGLAS H , PASS THOMAS
- 申请人: SUNPOWER CORP , PAVANI LUCA , KAMINAR NEIL , URALWONG PONGSTHORN , PHU THOMAS , ROSE DOUGLAS H , PASS THOMAS
- 专利权人: SUNPOWER CORP,PAVANI LUCA,KAMINAR NEIL,URALWONG PONGSTHORN,PHU THOMAS,ROSE DOUGLAS H,PASS THOMAS
- 当前专利权人: SUNPOWER CORP,PAVANI LUCA,KAMINAR NEIL,URALWONG PONGSTHORN,PHU THOMAS,ROSE DOUGLAS H,PASS THOMAS
- 优先权: US49282803 2003-08-06; US91234804 2004-08-04
- 主分类号: C25D17/06
- IPC分类号: C25D17/06 ; C25D17/08 ; H01L20060101 ; H01L21/288 ; C25B9/02 ; B23Q3/06 ; B23Q3/08 ; B25B11/02 ; C25B9/04
摘要:
A carrier includes a support frame (10) on which a plurality of wafers (12) are mounted with at least one auxiliary frame (20) for holding the wafers on the support frame. A plurality of clips (24) extend from the auxiliary frame and engage the wafers in pressure engagement, and fasteners (32) retain the auxiliary frame in position with the support frame. Two auxiliary frames can be employed for holding the wafers on opposing sides of the support frame. The support frame and auxiliary frame have electrically nonconducting surfaces. The clips extending from the auxiliary frame are electrically conductive and bridge current from the support frame to the wafers during plating operations. The support frame can also be made to include wafer retention clips, so that the auxiliary frame is not used. The carrier support of the invention can support multiple wafers and yield no significant mechanical stress on the wafers during processing.
摘要(中):
载体包括支撑框架(10),多个晶片(12)在其上安装有至少一个用于将晶片保持在支撑框架上的辅助框架(20)。 多个夹子(24)从辅助框架延伸并且以压力接合方式接合晶片,并且紧固件(32)将辅助框架保持在支撑框架的适当位置。 可以使用两个辅助框架来将晶片保持在支撑框架的相对侧上。 支撑框架和辅助框架具有非导电表面。 在电镀操作期间,从辅助框架延伸的夹子是导电的,并且桥接电流从支撑框架到晶片。 支撑框架也可以制成包括晶片固定夹,从而不使用辅助框架。 本发明的载体支撑件可以支撑多个晶片,并且在处理期间不会对晶片产生显着的机械应力。
IPC结构图谱:
C | 化学;冶金 |
--C25 | 电解或电泳工艺;其所用设备 |
----C25D | 覆层的电解或电泳生产工艺方法;电铸;工件的电解法接合;所用的装置 |
------C25D17/00 | 电解镀覆用电解槽的结构件、或其组合件 |
--------C25D17/06 | .施镀制品的悬挂或支承装置 |