基本信息:
- 专利标题: SPATIAL LIGHT MODULATOR
- 专利标题(中):空间光调制器
- 申请号:PCT/US0031762 申请日:2000-11-17
- 公开(公告)号:WO0137033A9 公开(公告)日:2002-08-15
- 发明人: WANG FEILING , LI KEWEN KEVIN , TSANG DEAN
- 申请人: CORNING APPLIED TECHNOLOGIES , WANG FEILING , LI KEWEN KEVIN , TSANG DEAN
- 专利权人: CORNING APPLIED TECHNOLOGIES,WANG FEILING,LI KEWEN KEVIN,TSANG DEAN
- 当前专利权人: CORNING APPLIED TECHNOLOGIES,WANG FEILING,LI KEWEN KEVIN,TSANG DEAN
- 优先权: US16638099 1999-11-18
- 主分类号: G02F1/03
- IPC分类号: G02F1/03 ; G02F1/055 ; G02F1/21
摘要:
A modulator formed with a solid state electro-optic material having a pixellated structure interconnected to a circuit on a semiconductor substrate. Silicon CMOS integrated circuit that can include random access memories (RAMs) are used as a substrate and interfaced to solid state electro-optic materials coated thereon. In particular, the electro-optic modulators are controlled by RAM cells to produce a modulation of reflected light. SRAMs can be used with connection to the SRAM cell flip-flop. DRAMs can be used with the modulator replacing the DRAM storage capacitor. The SLM thus formed can be connected to a digital computer and controlled as if were a being written to as a memory, but other IC structures can also be used. In order to enhance the modulation effects, the electro-optic material is used as the spacer for a Fabry-Perot etalon structure that is also deposited on the semiconductor substrate. PLZT is a suitable electro-optic material.
摘要(中):
用固态电光材料形成的调制器,具有与半导体衬底上的电路互连的像素化结构。 可以包括随机存取存储器(RAM)的硅CMOS集成电路用作衬底并且与其上涂覆的固态电光材料连接。 具体而言,电光调制器由RAM单元控制以产生反射光的调制。 SRAM可以连接到SRAM单元触发器。 随着调制器替代DRAM存储电容器,DRAM可以使用。 这样形成的SLM可以连接到数字计算机并且可以像被写入存储器一样进行控制,但也可以使用其他IC结构。 为了增强调制效果,电光材料被用作同样沉积在半导体衬底上的用于法布里 - 珀罗标准具结构的间隔物。 PLZT是一种合适的电光材料。
公开/授权文献:
- WO0137033A3 SPATIAL LIGHT MODULATOR 公开/授权日:2002-01-17