发明申请
WO1997042645A1 FIELD EMISSION TRIODE, A DEVICE BASED THEREON, AND A METHOD FOR ITS FABRICATION
审中-公开
基本信息:
- 专利标题: FIELD EMISSION TRIODE, A DEVICE BASED THEREON, AND A METHOD FOR ITS FABRICATION
- 专利标题(中):场发射三极管,基于其的器件及其制造方法
- 申请号:PCT/RU1997000133 申请日:1997-04-30
- 公开(公告)号:WO1997042645A1 公开(公告)日:1997-11-13
- 申请人: GIVARGIZOV, Evgeny Invievich , CHUBUN, Nikolai Nikolaevich , STEPANOVA, Alla Nikolaevna , ZHIRNOV, Viktor Vladimirovich
- 专利权人: GIVARGIZOV, Evgeny Invievich,CHUBUN, Nikolai Nikolaevich,STEPANOVA, Alla Nikolaevna,ZHIRNOV, Viktor Vladimirovich
- 当前专利权人: GIVARGIZOV, Evgeny Invievich,CHUBUN, Nikolai Nikolaevich,STEPANOVA, Alla Nikolaevna,ZHIRNOV, Viktor Vladimirovich
- 优先权: RU96109506 19960508
- 主分类号: H01J21/10
- IPC分类号: H01J21/10
摘要:
A field-electron-emission triode is based on silicon emitters prepared from an oriented whisker array. The whiskers were epitaxially grown on a (111) oriented single-crystalline silicon substrate by crystallization from vapor phase according to the vapor-liquid-solid mechanism. The same epitaxial process is used for preparation of columnar spacers that separate a gate (extracting) electrode from the substrate/cathode (spacers-1), and an anode from the cathode (spacers-2). Different diameters and heights of the tip emitters and of the columnar spacers are formed owing to different metal solvents that are used for initiation/localization of the oriented whisker growth. The semiconductor nature of the emitters makes it possible to use their high series resistance for uniformization of the field-electron-emission from large-area multiple-tip arrays. An additional uniformization of the emission is ensured owing to coating of the emitters with substances that decrease work function of the emitters.
摘要(中):
场电子发射三极管基于从定向晶须阵列制备的硅发射器。 根据气 - 液 - 固体机理,通过从气相结晶,在(111)取向的单晶硅衬底上外延生长晶须。 使用相同的外延工艺来制备从衬底/阴极(间隔物-1)分离栅极(提取)电极和从阴极(间隔物-2)分离阳极的柱状间隔物。 由于用于引导/定位取向的晶须生长的不同的金属溶剂,形成尖端发射体和柱状间隔物的不同直径和高度。 发射体的半导体性质使得可以使用它们的高串联电阻来均匀化来自大面积多尖端阵列的场致电子发射。 通过用降低发射器的功能的物质涂覆发射器,确保了发射的额外均匀化。
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01J | 放电管或放电灯 |
------H01J21/00 | 真空管 |
--------H01J21/02 | .有单一放电通道的真空管 |
----------H01J21/06 | ..只有静电控制装置的 |
------------H01J21/10 | ...带有一个或一个以上固定的内部控制极的,如三极管、五极管、八极管 |