基本信息:
- 专利标题: SEMICONDUCTOR LIGHT EMITTING DEVICE
- 专利标题(中):半导体发光器件
- 申请号:PCT/GB1990000884 申请日:1990-06-07
- 公开(公告)号:WO1990015461A1 公开(公告)日:1990-12-13
- 发明人: BT&D TECHNOLOGIES LIMITED
- 申请人: BT&D TECHNOLOGIES LIMITED , PLUMB, Richard, G.
- 专利权人: BT&D TECHNOLOGIES LIMITED,PLUMB, Richard, G.
- 当前专利权人: BT&D TECHNOLOGIES LIMITED,PLUMB, Richard, G.
- 优先权: GB8913070.2 19890607
- 主分类号: H01S03/19
- IPC分类号: H01S03/19
摘要:
A semiconductor device for amplifying radiation comprises an n-type substrate (1), a p-type layer (3) between which is located an active layer (2). Portions of the p-type layer (3) are removed by an etching process to create a central contact portion (11). Typically, the p-type layer portions are removed by an etching process in combination with a photoresist mask deposited on the top surface of the p-type layer (3). By using an etching process the contact portion can be shaped so that the photoresist layer then overhangs the contact portion (11). N-type ions are then implanted into the active layer (2) where the p-type layer (3) has been removed and the overhanging photoresist layer (4) creates non-implanted regions (10) in the active layer (20) which separates the implanted regions (8, 9) from the contact portion (11). The implanted regions (8, 9) have the effect of creating a potential barrier between the non-implanted regions of the first layer and the implanted regions and this prevents current injected into the contact portion (11) from spreading horizontally in the active layer (2).
摘要(中):
用于放大辐射的半导体器件包括n型衬底(1),其中位于有源层(2)之间的p型层(3)。 通过蚀刻工艺去除p型层(3)的部分以形成中心接触部分(11)。 通常,通过与沉积在p型层(3)的顶表面上的光刻胶掩模组合的蚀刻工艺去除p型层部分。 通过使用蚀刻工艺,可以使接触部分成形,使得光致抗蚀剂层然后悬垂在接触部分(11)上。 然后将N型离子注入已去除p型层(3)的有源层(2)中,并且悬垂光致抗蚀剂层(4)在有源层(20)中产生非注入区域(10), 将注入区域(8,9)与接触部分(11)分离。 注入区域(8,9)具有在第一层的非注入区域和注入区域之间产生势垒的作用,并且防止注入到接触部分(11)中的电流在有源层中水平扩展( 2)。