发明申请
US20210088914A1 CONTROL DEVICE, CONTROL METHOD, LITHOGRAPHIC APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND STORAGE MEDIUM
有权
基本信息:
- 专利标题： CONTROL DEVICE, CONTROL METHOD, LITHOGRAPHIC APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND STORAGE MEDIUM
- 申请号：US17011202 申请日：2020-09-03
- 公开(公告)号：US20210088914A1 公开(公告)日：2021-03-25
- 发明人： Mitsuhide Nishimura , Junichi Motojima
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2019-170166 20190919
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; H01L21/67
摘要：
A control device for performing position control of a control target by imparting a feedforward operation amount to the control target to curb a control deviation even when a continuous target time of the control exceeds an upper limit in a case where the position control is performed by imparting the feedforward operation amount, including at least one processor or circuit configured to function as a determination unit configured to determine whether or not a target time for continuing the control using the feedforward operation amount exceeds a predetermined time, and a correction unit configured to correct the feedforward operation amount to be damped toward an end of the target time in a case where it is determined by the determination unit that the target time has exceeded the predetermined time.