发明申请
US20200328096A1 CARRIER DEVICE, WORK PROCESSING APPARATUS, CONTROL METHOD OF CARRIER DEVICE AND STORAGE MEDIUM STORING PROGRAM
审中-公开
基本信息:
- 专利标题： CARRIER DEVICE, WORK PROCESSING APPARATUS, CONTROL METHOD OF CARRIER DEVICE AND STORAGE MEDIUM STORING PROGRAM
- 申请号：US16842974 申请日：2020-04-08
- 公开(公告)号：US20200328096A1 公开(公告)日：2020-10-15
- 发明人： Yohei ETO , Junji KUNISAWA , Teruaki HOMBO , Keiji KANAZAWA
- 申请人： EBARA CORPORATION , HIRATA CORPORATION
- 优先权： com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5469291e
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/687 ; H01L21/677
摘要：
An object is to suppress dew condensation in a carrier device. There is provided a carrier device comprising a body; a rotational part provided to be rotatable relative to the body; an arm supported on the rotational part; an end effector provided in a leading end portion of the arm and configured to hold a work; a gas supply unit configured to supply a gas to an arm-side internal space provided in an arm-side base portion of the end effector and/or in the leading end portion of the arm; and an exhaust unit provided in a body-side internal space that communicates with the arm-side internal space and configured to discharge the gas in the arm-side internal space and/or in the body-side internal space.
公开/授权文献:
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01L | 半导体器件；其他类目未包含的电固体器件 |
| ------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
| --------H01L21/67 | .专门适用于在制造或处理过程中处理半导体或电固体器件的装置；专门适合于在半导体或电固体器件或部件的制造或处理过程中处理晶片的装置 |