发明申请
US20190233277A1 PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES
审中-公开
基本信息:
- 专利标题： PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE AND DESIGN STRUCTURES
- 申请号：US16379982 申请日：2019-04-10
- 公开(公告)号：US20190233277A1 公开(公告)日：2019-08-01
- 发明人： Christopher V. JAHNES , Anthony K. STAMPER
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; H01L41/113 ; B81C1/00 ; H01H57/00 ; G06F17/50 ; H01H1/00 ; H01H59/00
摘要：
A method of forming a Micro-Electro-Mechanical System (MEMS) includes forming a lower electrode on a first insulator layer within a cavity of the MEMS. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and the upper electrode includes adjusting a metal volume of the lower electrode and the upper electrode to modify beam bending.
公开/授权文献:
IPC结构图谱:
| B | 作业；运输 |
| --B81 | 微观结构技术 |
| ----B81B | 微观结构的装置或系统，例如微观机械装置 |
| ------B81B3/00 | 由柔性或可变形的元件组成的装置，例如由弹性舌或膜片组成 |