![VDMOS DEVICE AND MANUFACTURING METHOD THEREFOR](/abs-image/US/2019/06/27/US20190198665A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: VDMOS DEVICE AND MANUFACTURING METHOD THEREFOR
- 申请号:US16329663 申请日:2017-08-09
- 公开(公告)号:US20190198665A1 公开(公告)日:2019-06-27
- 发明人: Zheng BIAN
- 申请人: CSMC TECHNOLOGIES FAB2 CO., LTD.
- 优先权: CN201610789301.6 20160831
- 国际申请: PCT/CN2017/096597 WO 20170809
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/66
摘要:
A VDMOS device and a manufacturing method therefor. The manufacturing method comprises: forming a groove in a semiconductor substrate, the groove comprising a first groove area, a second groove area, a third groove area, a fourth groove area and a fifth groove area; successively forming a first insulation layer, a first polycrystalline silicon layer and a second insulation layer on the semiconductor substrate; removing some of the second insulation layer until the first polycrystalline silicon layer is exposed; removing some of the first polycrystalline silicon layer, the remaining first polycrystalline silicon layer forming a first electrode; forming a third insulation layer on the semiconductor substrate, removing some of the third insulation layer, the second insulation layer and the first insulation layer, so that the top of the first polycrystalline silicon layer is higher than the top of the first insulation layer and the second insulation layer; and successively forming a gate oxide layer and a second polycrystalline silicon layer on the semiconductor substrate, and removing some of the second polycrystalline silicon layer, exposing the gate oxide layer located on the surface of the semiconductor substrate and the top of the second insulation layer, the remaining second polycrystalline silicon layer forming a second electrode.
公开/授权文献:
- US10854743B2 VDMOS device and manufacturing method therefor 公开/授权日:2020-12-01
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/68 | ..只能通过对一个不通有待整流、放大或切换的电流的电极供给电流或施加电位方可进行控制的 |
------------H01L29/70 | ...双极器件 |
--------------H01L29/762 | ....电荷转移器件 |
----------------H01L29/78 | .....由绝缘栅产生场效应的 |