基本信息:
- 专利标题： HERMETIC SEALING OF A NONLINEAR CRYSTAL FOR USE IN A LASER SYSTEM
- 申请号：US16133611 申请日：2018-09-17
- 公开(公告)号：US20190094653A1 公开(公告)日：2019-03-28
- 发明人： Rajeev Patil , David Ramirez , Yevgeniy Churin , William Replogle
- 申请人： KLA-Tencor Corporation
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 主分类号： G02F1/35
- IPC分类号： G02F1/35 ; H01L21/67 ; H01S3/00
摘要：
Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.