基本信息:
- 专利标题： MAGNETICALLY GUIDED CHIPLET DISPLACEMENT
- 申请号：US15969402 申请日：2018-05-02
- 公开(公告)号：US20180254395A1 公开(公告)日：2018-09-06
- 发明人： Stephen W. Bedell , Bing Dang , Ning Li , Frank R. Libsch , Devendra K. Sadana
- 申请人： International Business Machines Corporation
- 主分类号： H01L33/62
- IPC分类号： H01L33/62 ; H01L25/075
摘要：
Magnetic regions of at least one of chiplet or a receiving substrate are used to permit magnetically guided precision placement of chiplets on the receiving substrate. In some embodiments, a scanning magnetic head can be used to release individual chiplets from a temporary support substrate to the receiving substrate. Structures are provided in which a magnetic moment of a controlled orientation exists between the transferred chiplets and the receiving substrate.
公开/授权文献:
- US10319893B2 Magnetically guided chiplet displacement 公开/授权日：2019-06-11