基本信息:
- 专利标题： WAFER BOAT, ANNEALING TOOL AND ANNEALING METHOD
- 申请号：US14918071 申请日：2015-10-20
- 公开(公告)号：US20170110353A1 公开(公告)日：2017-04-20
- 发明人： Ho-Cheng CHAO , Shun-Chin CHEN , Shao-Hua WANG , Shih-Fang CHEN
- 申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 主分类号： H01L21/673
- IPC分类号： H01L21/673 ; H01L21/324 ; H01L21/67
摘要：
A wafer boat includes a base, a plurality of support rods and a plurality of cantilever arms. The support rods are carried by the base. The support rods are disposed around a space above the base. The cantilever arms are carried by the support rods. At least two of the cantilever arms carried by at least one of the support rods are vertically spaced apart to define at least one slot for a wafer.