发明申请
US20150247239A1 CARBON ELECTRODE AND APPARATUS FOR MANUFACTURING POLYCRYSTALLINE SILICON ROD
审中-公开
基本信息:
- 专利标题： CARBON ELECTRODE AND APPARATUS FOR MANUFACTURING POLYCRYSTALLINE SILICON ROD
- 专利标题（中）：用于制造多晶硅线的碳电极和装置
- 申请号：US14715952 申请日：2015-05-19
- 公开(公告)号：US20150247239A1 公开(公告)日：2015-09-03
- 发明人： Shigeyoshi NETSU , Shinichi Kurotani , Kyoji Oguro , Fumitaka Kume , Masaru Hirahara
- 申请人： Shin-Etsu Chemical Co., Ltd.
- 申请人地址： JP Tokyo
- 专利权人： Shin-Etsu Chemical Co., Ltd
- 当前专利权人： Shin-Etsu Chemical Co., Ltd
- 当前专利权人地址： JP Tokyo
- 优先权： JP2009-268429 20091126
- 主分类号： C23C16/458
- IPC分类号： C23C16/458 ; C23C16/24
摘要：
The upper electrode 31 has a hole 35 extending from an upper surface 33 to a lower surface 34, a bolt 36 is inserted from the upper surface 33 of the upper electrode 31 into the hole 35, and secured in a lower electrode 32 by a screw. A gap 51 between an inside of the hole 35 and a straight body portion of the bolt 36 allows the upper electrode 31 to slide in all directions in a placement surface (upper surface of the lower electrode 32 in contact with the lower surface 34 of the upper electrode 31 in FIG. 2) that is a contact surface with an upper surface of the lower electrode 32, thereby providing an effect of preventing occurrence of a crack or a break in a U rod that can be expanded and contracted in all directions during a vapor phase growth process.
摘要（中）：
上电极31具有从上表面33延伸到下表面34的孔35，将螺栓36从上电极31的上表面33插入孔35中，并通过螺钉固定在下电极32中 。 孔35的内部和螺栓36的直体部之间的间隙51允许上电极31在放置表面（在下电极32的下表面34的上表面）的所有方向上滑动 作为与下部电极32的上表面的接触面的图2中的上部电极31），由此提供防止U棒的发生龟裂或断裂的效果，U棒能够在各个方向上膨胀和收缩 气相生长过程。