发明申请
US20150114559A1 PLASMA SHIELDING MEMBERS, PLASMA DETECTING STRUCTURES, AND PLASMA REACTION APPARATUSES
审中-公开
基本信息:
- 专利标题： PLASMA SHIELDING MEMBERS, PLASMA DETECTING STRUCTURES, AND PLASMA REACTION APPARATUSES
- 专利标题（中）：等离子体屏蔽构件，等离子体检测结构和等离子体反应装置
- 申请号：US14461651 申请日：2014-08-18
- 公开(公告)号：US20150114559A1 公开(公告)日：2015-04-30
- 发明人： Eun-Young HAN , Hyun-Su JUN , Gyung-jin MIN , Kye-Hyun BAEK , Tae-Rang KIM
- 申请人： Eun-Young HAN , Hyun-Su JUN , Gyung-jin MIN , Kye-Hyun BAEK , Tae-Rang KIM
- 优先权： KR10-2013-0130444 20131030
- 主分类号： C23F1/02
- IPC分类号： C23F1/02 ; C23C16/04 ; C23F1/08 ; H01J37/32
摘要：
A plasma shielding member may include a body having a first surface and a second surface that are opposite to each other, and a plurality of through holes each extending from the first surface to the second surface; a narrower portion of a respective through hole formed at one end of each of the through holes; and/or a wider portion of the respective through hole formed at another end of each of the through holes. A plasma shielding member may include a body including a plurality of through holes that extends from a first surface of the body toward a second surface of the body. Each of the through holes may be defined by a narrower portion of the body at a first end of the respective through hole, and by a wider portion of the body at a second end of the respective through hole.
摘要（中）：
等离子体屏蔽构件可以包括具有彼此相对的第一表面和第二表面的主体以及从第一表面延伸到第二表面的多个通孔; 每个通孔的一端形成的相应通孔的较窄部分; 和/或形成在每个通孔的另一端的相应通孔的较宽部分。 等离子体屏蔽构件可以包括主体，其包括从主体的第一表面朝向主体的第二表面延伸的多个通孔。 每个通孔可以由相应通孔的第一端处的主体的较窄部分以及在相应通孔的第二端处的主体的较宽部分限定。