基本信息:
- 专利标题： Processing System
- 申请号：US13708936 申请日：2012-12-08
- 公开(公告)号：US20130098292A1 公开(公告)日：2013-04-25
- 发明人： Emmerich Bertagnolli , Heinz Wanzenboeck , Wolfram Buehler , Camille Stebler , Ulrike Zeile , Alexander Rosenthal
- 申请人： Emmerich Bertagnolli , Heinz Wanzenboeck , Wolfram Buehler , Camille Stebler , Ulrike Zeile , Alexander Rosenthal
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss NTS GmbH
- 当前专利权人： Carl Zeiss NTS GmbH
- 当前专利权人地址： DE Oberkochen
- 优先权： DE102008009640.7 20080218
- 主分类号： C23C16/48
- IPC分类号： C23C16/48
摘要：
A processing system for processing an object (3) is provided, wherein the processing system is adapted, to focus a first energy beam, in particular an electron beam (11), and a second energy beam, in particular an ion beam (21), on a focusing region (29) in which a object (3) to be processed is arrangeable. A processing chamber wall (35) having two openings (38, 39) for traversal of both energy beams and a connector (37) for supplying process gas delimits a processing chamber (45) from a vacuum chamber (2) of the processing system. Processing the object by activating the process gas through one of the energy beams and inspecting the object via one of the energy beams is enabled for different orientations of the object relative to a propagation direction of one of the energy beams.
公开/授权文献:
- US08939108B2 Processing system 公开/授权日：2015-01-27