![APPARATUS AND PROCESS FOR CRYSTAL GROWTH](/abs-image/US/2011/03/31/US20110073034A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: APPARATUS AND PROCESS FOR CRYSTAL GROWTH
- 专利标题(中):晶体生长的装置和工艺
- 申请号:US12904434 申请日:2010-10-14
- 公开(公告)号:US20110073034A1 公开(公告)日:2011-03-31
- 发明人: Arnab Basu , Max Robinson , Ben Cantwell , Andy Brinkman
- 申请人: Arnab Basu , Max Robinson , Ben Cantwell , Andy Brinkman
- 申请人地址: GB County Durham
- 专利权人: DURHAM SCIENTIFIC CRYSTALS LIMITED
- 当前专利权人: DURHAM SCIENTIFIC CRYSTALS LIMITED
- 当前专利权人地址: GB County Durham
- 优先权: GB0503634.8 20050222
- 主分类号: C30B35/00
- IPC分类号: C30B35/00 ; C30B23/00
摘要:
The present invention relates to an apparatus for vapour phase crystal growth to produce multiple single crystals in one growth cycle comprising one central source chamber, a plurality of growth chambers, a plurality of passage means adapted for transport of vapour from the source chamber to the growth chambers, wherein the source chamber is thermally decoupled from the growth chambers.
摘要(中):
本发明涉及用于在一个生长循环中产生多个单晶的气相晶体生长的装置,包括一个中心源室,多个生长室,适于将蒸气从源室输送到生长的多个通道装置 室,其中源室与生长室热分离。