发明申请
US20060094188A1 Methods of fabricating flash memory devices and flash memory devices fabricated thereby
有权
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基本信息:
- 专利标题: Methods of fabricating flash memory devices and flash memory devices fabricated thereby
- 专利标题(中):制造闪存器件和闪存器件的方法
- 申请号:US11261820 申请日:2005-10-28
- 公开(公告)号:US20060094188A1 公开(公告)日:2006-05-04
- 发明人: Dong-Chan Kim , Chang-Jin Kang , Kyeong-Koo Chi , Dong-Hyun Kim
- 申请人: Dong-Chan Kim , Chang-Jin Kang , Kyeong-Koo Chi , Dong-Hyun Kim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR2004-0087518 20041029
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
Methods of fabricating a flash memory device and flash memory devices fabricated thereby are provided. One of the methods includes forming an isolation layer in a semiconductor substrate to define a plurality of parallel active regions in the semiconductor substrate. A plurality of first conductive layer patterns are formed on the active regions. The first conductive layer patterns are spaced apart from each other in a lengthwise direction of the active regions. An insulating layer is conformally formed on the semiconductor substrate and the first conductive layer patterns. A second conductive layer is formed on the insulating layer. The second conductive layer is patterned until the insulating layer is exposed to form a plurality of parallel second conductive layer patterns. The second conductive layer patterns cross the active regions and the isolation layer to overlap the first conductive layer patterns.
摘要(中):
提供了制造闪速存储器件的方法和由此制造的闪存器件。 一种方法包括在半导体衬底中形成隔离层以在半导体衬底中限定多个平行的有源区。 在有源区上形成多个第一导电层图案。 第一导电层图案在活性区域的长度方向上彼此间隔开。 在半导体衬底和第一导电层图案上共形形成绝缘层。 在绝缘层上形成第二导电层。 图案化第二导电层直到绝缘层暴露以形成多个平行的第二导电层图案。 第二导电层图案与有源区和隔离层交叉,以与第一导电层图案重叠。
公开/授权文献:
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/18 | ...器件有由周期表第Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体,如掺杂材料 |
--------------H01L21/26 | ....用波或粒子辐射轰击的 |
----------------H01L21/335 | .....场效应晶体管 |
------------------H01L21/336 | ......带有绝缘栅的 |