基本信息:
- 专利标题： Carbon nanotube array and method for making same
- 专利标题（中）：碳纳米管阵列及其制造方法
- 申请号：US10640340 申请日：2003-08-12
- 公开(公告)号：US20040109815A1 公开(公告)日：2004-06-10
- 发明人： Liang Liu , Shou-Shan Fan
- 优先权： CN02152193.X 20021205
- 主分类号： D01F009/12
- IPC分类号： D01F009/12
摘要：
A carbon nanotube-based device (40) includes a substrate (10), a number of catalytic nano-sized particles (131) formed on the substrate, and an aligned carbon nanotube array (15) extending from the alloy catalytic nano-sized particles. The aligned carbon nanotube array progressively bends in a predetermined direction. A method for making the carbon nanotube-based device includes the steps of: providing a substrate; depositing a layer of catalyst on the substrate; depositing a layer of catalyst-doped material on the catalyst layer, for varying a reaction rate of synthesis of the aligned carbon nanotube array; annealing the catalyst and the catalyst-doped material in an oxygen-containing gas at a low temperature; and exposing the nano-sized particles and catalyst-doped material to a carbon-containing source gas at a predetermined temperature such that the aligned carbon nanotube array grows from the substrate.
摘要（中）：
基于碳纳米管的器件（40）包括基板（10），形成在基板上的多个催化纳米尺寸颗粒（131）和从合金催化纳米尺寸颗粒延伸的排列的碳纳米管阵列（15） 。 对准的碳纳米管阵列沿预定方向逐渐弯曲。 制造碳纳米管的器件的方法包括以下步骤：提供衬底; 在衬底上沉积催化剂层; 在催化剂层上沉积催化剂掺杂材料层，以改变对准的碳纳米管阵列的合成反应速率; 在低温下在含氧气体中退火催化剂和催化剂掺杂材料; 以及将纳米尺寸颗粒和催化剂掺杂材料暴露于预定温度下的含碳源气体，使得对准的碳纳米管阵列从衬底生长。
公开/授权文献:
- US07161286B2 Carbon nanotube array and method for making same 公开/授权日：2007-01-09