发明申请
US20030072046A1 Holographic illuminator for synchrotron-based projection lithography systems
有权
基本信息:
- 专利标题： Holographic illuminator for synchrotron-based projection lithography systems
- 专利标题（中）：用于基于同步加速器的投影光刻系统的全息照明器
- 申请号：US09981500 申请日：2001-10-16
- 公开(公告)号：US20030072046A1 公开(公告)日：2003-04-17
- 发明人： Patrick P. Naulleau
- 主分类号： G02B005/32
- IPC分类号： G02B005/32 ; F21S002/00 ; G02B005/18 ; G02B027/44
摘要：
The effective coherence of a synchrotron beam line can be tailored to projection lithography requirements by employing a moving holographic diffuser and a stationary low-cost spherical mirror. The invention is particularly suited for use in an illuminator device for an optical image processing system requiring partially coherent illumination. The illuminator includes: (1) a synchrotron source of coherent or partially coherent radiation which has an intrinsic coherence that is higher than the desired coherence, (2) a holographic diffuser having a surface that receives incident radiation from said source, (3) means for translating the surface of the holographic diffuser in two dimensions along a plane that is parallel to the surface of the holographic diffuser wherein the rate of the motion is fast relative to integration time of said image processing system; and (4) a condenser optic that re-images the surface of the holographic diffuser to the entrance plane of said image processing system.
摘要（中）：
同步加速器束线的有效相干性可以通过采用移动全息漫射器和固定的低成本球面镜来调整投影光刻要求。 本发明特别适用于需要部分相干照明的光学图像处理系统的照明装置。 照明器包括：（1）相干或部分相干辐射的同步加速器源，其具有高于期望相干性的固有相干性，（2）具有接收来自所述源的入射辐射的表面的全息漫射器，（3） 用于沿着平行于全息漫射器的表面的平面二维地平移全息漫射器的表面，其中运动速率相对于所述图像处理系统的积分时间是快的; 和（4）将所述全息漫射器的表面重新成像到所述图像处理系统的入射面的聚光镜。