基本信息:
- 专利标题： 自動化加工裝置中工件偵測用之方法與裝置
- 专利标题（英）：Method and device to detect a workpiece in an automatic processing device
- 专利标题（中）：自动化加工设备中工件侦测用之方法与设备
- 申请号：TW089105350 申请日：2000-03-24
- 公开(公告)号：TW467790B 公开(公告)日：2001-12-11
- 发明人： 史坦曼布瑞德 , 漢茲奇歐夫
- 申请人： 印芬龍科技股份有限公司
- 申请人地址： 德國
- 专利权人： 印芬龍科技股份有限公司
- 当前专利权人： 印芬龍科技股份有限公司
- 当前专利权人地址： 德國
- 代理人： 何金塗
- 优先权： 德國 19913365.4 19990324
- 主分类号： B23Q
- IPC分类号： B23Q ; G01V ; B24B
第1a圖
This invention provides a method and device to identify the pressure of the workpieces in an automatic processing device. The previous identification device can not in all conditions make a clear distinction between the presence or absence of the workpieces. Therefore, it furnishes a device, which is composed of an ultrasonic sender, an ultrasonic receiver, and an detection device (controller). The detection, whether a workpiece is held in the holder of the processing device, is carried out through the checking of the holder with the ultrasonic wave, receiving, the reflected ultrasonic wave, and the detection based on the reflected ultrasonic wave. The method is especially advantageous in the polishing machine for the utilization of the wafers, where the polishibn cloth's reflection ability is apparently different from that of the wafer to be polished.