基本信息:
- 专利标题: 半導體裝置
- 专利标题(英):Semiconductor device
- 专利标题(中):半导体设备
- 申请号:TW104128930 申请日:2015-09-02
- 公开(公告)号:TW201631758A 公开(公告)日:2016-09-01
- 发明人: 山下浩明 , YAMASHITA, HIROAKI , 小野昇太郎 , ONO, SYOTARO , 浦秀幸 , URA, HIDEYUKI , 志村昌洋 , SHIMURA, MASAHIRO
- 申请人: 東芝股份有限公司 , KABUSHIKI KAISHA TOSHIBA
- 专利权人: 東芝股份有限公司,KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: 東芝股份有限公司,KABUSHIKI KAISHA TOSHIBA
- 代理人: 陳長文
- 优先权: 2015-039388 20150227
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/66 ; H01L29/78
According to one embodiment, a semiconductor device includes a plurality of first semiconductor regions of a first conductivity type, a plurality of second semiconductor regions of a second conductivity type, a third semiconductor region of the second conductivity type, a fourth semiconductor region of the second conductivity type, a fifth semiconductor region of the first conductivity type, and a gate electrode. An impurity concentration of the second conductivity type of the third semiconductor region is higher than an impurity concentration of the second conductivity type of the second semiconductor regions. The fourth semiconductor region is provided on the first semiconductor regions. The gate electrode provided on the fourth semiconductor region with a gate insulation layer interposed. The gate electrode extends in a third direction. The third direction intersects the first direction. The third direction is parallel to a plane including the first direction and the second direction.
公开/授权文献:
- TWI595649B 半導體裝置 公开/授权日:2017-08-11