基本信息:
- 专利标题： 多級靈敏度輸出的微機電系統麥克風裝置以及其電路
- 专利标题（英）：Micro electro-mechanical system microphone device with multi-sensitivity outputs and circuit thereof
- 专利标题（中）：多级灵敏度输出的微机电系统麦克风设备以及其电路
- 申请号：TW102135386 申请日：2013-09-30
- 公开(公告)号：TW201509195A 公开(公告)日：2015-03-01
- 发明人： 李建興 , LEE, CHIEN HSING , 謝聰敏 , HSIEH, TSUNG MIN , 劉志成 , LIOU, JHYY CHENG
- 申请人： 鑫創科技股份有限公司 , SOLID STATE SYSTEM CO., LTD.
- 申请人地址： 新竹縣
- 专利权人： 鑫創科技股份有限公司,SOLID STATE SYSTEM CO., LTD.
- 当前专利权人： 鑫創科技股份有限公司,SOLID STATE SYSTEM CO., LTD.
- 当前专利权人地址： 新竹縣
- 代理人： 詹銘文; 葉璟宗
- 优先权： 14/013,049 20130829
- 主分类号： H04R1/04
- IPC分类号： H04R1/04 ; B81B7/00
A MEMS device includes substrate having a cavity. A dielectric layer is disposed on a second side of substrate at periphery of the cavity. A backplate structure is formed with the dielectric layer on a first side of the substrate and exposed by the cavity. The backplate structure includes at least a first backplate and a second backplate. The first backplate and the second backplate are electric disconnected and have venting holes to connect the cavity and the chamber. A diaphragm is disposed above the backplate structure by a distance, so as to form a chamber between the backplate structure and the diaphragm. A periphery of the diaphragm is embedded in the dielectric layer. The diaphragm serves as a common electrode. The first backplate and the second backplate respectively serve as a first electrode unit and a second electrode unit in conjugation with the diaphragm to form separate two capacitors.
公开/授权文献:
- TWI516135B 多級靈敏度輸出的微機電系統麥克風裝置以及其電路 公开/授权日：2016-01-01
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H04 | 电通信技术 |
| ----H04R | 扬声器、送话器、唱机拾音器或类似的传感器 |
| ------H04R1/00 | 传感器的零部件 |
| --------H04R1/02 | .盒；机壳；其中的托架 |
| ----------H04R1/04 | ..传声器与所用电路的结构配合 |