基本信息:
- 专利标题： 壓印裝置與物品的製造方法
- 专利标题（英）：Imprint apparatus and article manufacturing method
- 专利标题（中）：压印设备与物品的制造方法
- 申请号：TW101123501 申请日：2012-06-29
- 公开(公告)号：TW201302419A 公开(公告)日：2013-01-16
- 发明人： 服部正 , HATTORI, TADASHI
- 申请人： 佳能股份有限公司 , CANON KABUSHIKI KAISHA
- 专利权人： 佳能股份有限公司,CANON KABUSHIKI KAISHA
- 当前专利权人： 佳能股份有限公司,CANON KABUSHIKI KAISHA
- 代理人： 林志剛
- 优先权： 2011-157123 20110715
- 主分类号： B29C43/58
- IPC分类号： B29C43/58 ; B29C59/02
An imprint apparatus includes: a first driving mechanism configured to move at least one of a mold holder and a substrate holder such that a mold and an imprint material are contact with each other; a second driving mechanism configured to move at least one of the holders such that the substrate is aligned with the mold; a measurement device configured to measure relative positions between a mold mark and a substrate mark in a state in which the mold and the imprint material are not in contact with each other; and a controller configured to control the second driving mechanism based on information of a relationship between a moving amount of at least one of the holders, and change in relative positions between the marks, information of the moving amount, and information of the measured relative positions.
公开/授权文献:
- TWI554378B 壓印裝置與物品的製造方法 公开/授权日：2016-10-21
信息查询:
EspacenetIPC结构图谱:
| B | 作业；运输 |
| --B29 | 塑料的加工；一般处于塑性状态物质的加工 |
| ----B29C | 塑料的成型或连接；塑性状态物质的一般成型；已成型产品的后处理，如修整 |
| ------B29C43/00 | 压力成型，即施加外部压力使造型材料流动；所用的设备 |
| --------B29C43/02 | .定长的制品，即不连续的制品 |
| ----------B29C43/58 | ..测量、控制或调整 |