基本信息:
- 专利标题: 低雜訊半導體光感測器 LOW-NOISE SEMICONDUCTOR PHOTODETECTORS
- 专利标题(英):Low-noise semiconductor photodetectors
- 专利标题(中):低噪声半导体光传感器 LOW-NOISE SEMICONDUCTOR PHOTODETECTORS
- 申请号:TW095131023 申请日:2006-08-23
- 公开(公告)号:TW200717785A 公开(公告)日:2007-05-01
- 发明人: 科諾S 雷弗堤 RAFFERTY, CONOR S. , 克里弗德 亞倫 金 KING, CLIFFORD ALAN
- 申请人: 諾伯裝置科技公司 NOBLE DEVICE TECHNOLOGIES CORP.
- 申请人地址: 美國
- 专利权人: 諾伯裝置科技公司 NOBLE DEVICE TECHNOLOGIES CORP.
- 当前专利权人: 諾伯裝置科技公司 NOBLE DEVICE TECHNOLOGIES CORP.
- 当前专利权人地址: 美國
- 代理人: 陳長文
- 优先权: 美國 11/210,223 20050823
- 主分类号: H01L
- IPC分类号: H01L
A photodetector is formed from a body of semiconductor material substantially surrounded by dielectric surfaces. A passivation process is applied to at least one surface to reduce the rate of carrier generation and recombination on that surface. Photocurrent is read out from at least one electrical contact, which is formed on a doped region whose surface lies entirely on a passivated surface. Unwanted leakage current from un-passivated surfaces is reduced through one of the following methods. (a) The un-passivated surface is separated from the photo-collecting contact by at least two junctions (b) The un-passivated surface is doped to a very high level, at least equal to the conduction band or valence band density of states of the semiconductor (c) An accumulation or inversion layer is formed on the un-passivated surface by the application of an electric field. Electrical contacts are made to all doped regions, and bias is applied so that a reverse bias is maintained across all junctions.