基本信息:
- 专利标题： 가스 전계 전리 이온원
- 专利标题（英）：GAS FIELD IONIZATION SOURCE
- 申请号：KR1020200028782 申请日：2020-03-09
- 公开(公告)号：KR102326843B1 公开(公告)日：2021-11-15
- 优先权： JPJP-P-2019-091313 2019-05-14
- 主分类号： H01J37/08
- IPC分类号： H01J37/08 ; H01J27/26
摘要：
(과제) 에미터팁을냉각할필요가없거나, 또는종래보다약한냉각으로운용가능하게하는가스전계전리이온원을제공한다. (해결수단) 가스를이온화하는전계를형성하는가스전계전리이온원(1, 2)은, 선단(先端)을가지는에미터팁(11)과, 에미터팁(11)에대향하고, 이격된위치에개구를가지는인출전극(13)과, 에미터팁(11)의근방에가스를공급하는가스공급수단(31, 45)과, 구멍(125)을갖는금속제의진공격벽(12)과, 에미터팁(11)과인출전극(13) 사이에전압을인가하는고전압전원(111, 112)을구비한다. 구멍(125)은, 에미터팁(11)의선단이통과가능해지도록구성되고, 진공격벽(12)은, 구멍(125)의주변에있어서인출전극(13)측을향하여돌출하는미소(微小) 돌기(121)를갖는다.
摘要（英）：
A gas field ionization source for forming an electric field for ionizing gas comprises: an emitter tip having a tip end; an extraction electrode facing the emitter tip and having an aperture at a position distant therefrom; a gas supply means for supplying the gas in the vicinity of the emitter tip; a vacuum partition made of a metal having a hole; and a high voltage power source for applying voltage between the emitter tip and the extraction electrode. The hole is constructed so that the tip end of the emitter tip can pass therethrough and the vacuum partition has a micro protrusion, around the hole, protruding toward a side of the extraction electrode.
信息查询:
EspacenetIPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/04 | ..电极装置及与产生或控制放电的部件有关的装置，如电子光学装置，离子光学装置 |
| ------------H01J37/08 | ...离子源；离子枪 |