基本信息:
- 专利标题: 탄화규소 단결정의 제조방법
- 申请号:KR20207024691 申请日:2019-02-14
- 公开(公告)号:KR20200128007A 公开(公告)日:2020-11-11
- 发明人: IKEDA HITOSHI , MATSUMOTO YUICHI , TAKAHASHI TORU
- 申请人: SHINETSU HANDOTAI KK
- 专利权人: SHINETSU HANDOTAI KK
- 当前专利权人: SHINETSU HANDOTAI KK
- 优先权: JP2018042289 2018-03-08
- 主分类号: C30B23/02
- IPC分类号: C30B23/02 ; C30B29/36
The present invention provides a method for manufacturing a silicon carbide single crystal by sublimating a solid silicon carbide raw material in a growth container to grow a silicon carbide single crystal on a seed crystal substrate. The method includes: mixing a tantalum (Ta) powder with a carbon powder; attaching the mixture to the solid silicon carbide raw material in the growth container; and heating the resultant for sintering to form a tantalum carbide (TaC) coating film on a surface of the solid silicon carbide raw material. A silicon carbide single crystal is grown after or while the coating film is formed. Thereby, the present invention provides a method for manufacturing a silicon carbide single crystal with few carbon inclusions.