基本信息:
- 专利标题： 기판 수납을 위한 일체형 코너 스프링을 구비한 수평 기판 용기
- 专利标题（英）：Horizontal substrate container with integral corner spring for substrate containment
- 专利标题（中）：一种水平基板容器，其具有用于容纳基板的整体角部弹簧
- 申请号：KR1020177018547 申请日：2015-12-08
- 公开(公告)号：KR1020170093893A 公开(公告)日：2017-08-16
- 发明人： 커클랜드에릭에이
- 申请人： 엔테그리스, 아이엔씨.
- 申请人地址： *** Concord Road, Billerica, Massachusetts *****-****, United States of America
- 专利权人： 엔테그리스, 아이엔씨.
- 当前专利权人： 엔테그리스, 아이엔씨.
- 当前专利权人地址： *** Concord Road, Billerica, Massachusetts *****-****, United States of America
- 代理人： 양영준; 지형근
- 优先权： US62/089,103 2014-12-08
- 国际申请： PCT/US2015/064483 2015-12-08
- 国际公布： WO2016094398 2016-06-16
- 主分类号： H01L21/673
- IPC分类号： H01L21/673
Substrate container comprises a substrate support, such as, concentric rings are configured to receive a substrate in a substrate stack. The container comprises a base and an upper cover to enclose the substrate stack. The locking mechanism locks the top cover to the base is configured to hold the substrate stack in the container. The lock mechanism includes an elastic corner flange on the outer part of the container, the flange acts as a spring for applying a biasing force on the cover and the substrate stack. Flange maintains the stack in the container, while accommodating the laminate uncertainty due to the accumulation of uncertainty due to component machining tolerances. In some embodiments, a gap is created between the top cover side walls and the container base to ensure the compression of the substrate stack. There deflection limiting group can be implemented to prevent the deflection of the flange.