基本信息:
- 专利标题： 레이저 어닐링 도징 장치
- 专利标题（英）：Laser annealing dodging apparatus
- 专利标题（中）：激光退火设备
- 申请号：KR1020167022637 申请日：2015-01-15
- 公开(公告)号：KR1020160111467A 公开(公告)日：2016-09-26
- 发明人： 쑤,지안쑤 , 란,얀핑
- 申请人： 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
- 申请人地址： **** Zhangdong Road, Zhangjiang Hi-Tech Park, Shanghai ****** CHINA
- 专利权人： 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
- 当前专利权人： 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
- 当前专利权人地址： **** Zhangdong Road, Zhangjiang Hi-Tech Park, Shanghai ****** CHINA
- 代理人： 유성원; 배경용; 전소정
- 优先权： CN2014100438529 2014-01-29
- 国际申请： PCT/CN2015/070747 2015-01-15
- 国际公布： WO2015113469 2015-08-06
- 主分类号： G02B27/48
- IPC分类号： G02B27/48 ; G02B27/62 ; G02B3/00
In the laser annealing the dosing device 500 which is applied to a laser annealing apparatus including the laser unit 100 is used for emitting a laser beam, laser annealing the dosing device comprises a plurality of cylindrical lenses 510, both the radius of curvature the same and, and the respective size of the cylindrical lens 510 in a plane identical to the curvature is located, and each of the two cylinders in the different length of each cylindrical lens 510 in the direction of propagation of the beam, and the beam of the radio wave direction differences in length of the lens 510 is longer than the length of coherence of the laser device. In the prior art, a transparent glass plate 11 and the cylindrical lens was used as alternative to the cylindrical lenses 510 of different large length a combination method of (21), the same realizes the dosing action for interference cancellation and the beam, at the same time diffraction this dosing effect was causing the problem is solved not ideal for, and the hypothesis was reduced difficulty of the optical system, the cost was reduced.
公开/授权文献:
- KR101918252B1 레이저 어닐링 도징 장치 公开/授权日：2018-11-13
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G02 | 光学 |
| ----G02B | 光学元件、系统或仪器 |
| ------G02B27/00 | 其他光学系统；其他光学仪器 |
| --------G02B27/48 | .激光斑纹光学 |