基本信息:
- 专利标题： 레이저 어닐링 도징 장치
- 专利标题（英）：KR101918252B1 - Laser annealing dodging apparatus
- 申请号：KR1020167022637 申请日：2015-01-15
- 公开(公告)号：KR101918252B1 公开(公告)日：2018-11-13
- 发明人： 쑤,지안쑤 , 란,얀핑
- 申请人： 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
- 申请人地址： **** Zhangdong Road, Zhangjiang Hi-Tech Park, Shanghai ****** CHINA
- 专利权人： 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
- 当前专利权人： 상하이 마이크로 일렉트로닉스 이큅먼트(그룹) 컴퍼니 리미티드
- 当前专利权人地址： **** Zhangdong Road, Zhangjiang Hi-Tech Park, Shanghai ****** CHINA
- 代理人： 유성원; 배경용; 전소정
- 优先权： CN2014100438529 2014-01-29
- 国际申请： PCT/CN2015/070747 2015-01-15
- 国际公布： WO2015113469 2015-08-06
- 主分类号： G02B27/48
- IPC分类号： G02B27/48 ; G02B27/62 ; G02B3/00
In the laser annealing dosing device 500 which is applied to a laser annealing apparatus including the laser unit 100 is used for emitting a laser beam, laser annealing, the dosing device comprises both the radius of curvature the same plurality of cylindrical lenses 510 and the same size of each cylindrical lens 510 in the plane of curvature is located, and also the lengths of the cylindrical lens 510 in the propagation direction of the beam different, and each of the two cylinders in the direction of propagation of the beam is a length difference between the lens 510 of the laser unit is longer than the coherence length. Achieve a transparent glass plate 11 and the dosing action of the combination method was a length of an alternate to the cylindrical lenses 510 of different large size, the same interference cancellation and the beam of the cylindrical lens 21 in the prior art and, at the same time, the diffraction was solved also the problem dosing effect is not ideal resulting in further reduced the hypothesis of difficulty of the optical system was cost savings.
公开/授权文献:
- KR1020160111467A 레이저 어닐링 도징 장치 公开/授权日：2016-09-26
信息查询:
EspacenetIPC结构图谱:
| G | 物理 |
| --G02 | 光学 |
| ----G02B | 光学元件、系统或仪器 |
| ------G02B27/00 | 其他光学系统；其他光学仪器 |
| --------G02B27/48 | .激光斑纹光学 |