基本信息:
- 专利标题： 압력 순환식 흡착에 의한 삼불화질소의 정제 방법
- 专利标题（英）：Purification of nitrogen trifluoride by pressure swing adsorption
- 专利标题（中）：通过压力吸收来净化三氮呋喃
- 申请号：KR1020150116733 申请日：2015-08-19
- 公开(公告)号：KR1020160023578A 公开(公告)日：2016-03-03
- 发明人： 헨더슨,필립브루스 , 언더우드,리차드폴
- 申请人： 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드
- 申请人地址： 미합중국 펜실베니아주 *****-**** 알렌타운시 해밀턴 불라바아드 ****
- 专利权人： 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드
- 当前专利权人： 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드
- 当前专利权人地址： 미합중국 펜실베니아주 *****-**** 알렌타운시 해밀턴 불라바아드 ****
- 代理人： 특허법인 남앤드남
- 优先权： US14/466,194 2014-08-22
- 主分类号： C01B21/083
- IPC分类号： C01B21/083
The present invention is a pressure swing adsorption process for producing a nitrogen trifluoride (nf3) purified using a packed column with an adsorbent showing the selectivity to nf3 than cf4 from the feed gas contaminated with carbon tetrafluoride (cf4) It relates. The process without the use of an inert carrier gas, thereby substantially recovering and separating the feed gas to the cf4 density higher than the feed gas first product gas and the cf4 concentration lower than the feed gas a second product gas all nf3. The process after the column is charged to the column until it reaches a first pressure in the feed gas and, after removing the first product gas, removing a second product gas, and the second product gas is removed, the column is the second include those present in the pressure. A first rinsing gas nf3 and cf4 be used to remove the product gas or the second product gas.
公开/授权文献:
- KR101718811B1 압력 순환식 흡착에 의한 삼불화질소의 정제 방법 公开/授权日：2017-03-22
信息查询:
EspacenetIPC结构图谱:
| C | 化学；冶金 |
| --C01 | 无机化学 |
| ----C01B | 非金属元素；其化合物 |
| ------C01B21/00 | 氮；其化合物 |
| --------C01B21/082 | .含氮和非金属的化合物 |
| ----------C01B21/083 | ..含有1个或多个卤素原子 |