Even if the capacitance of the wiring of a subject small, and provides the inspection apparatus and inspection method capable of performing a scan of a subject by the measurement of capacitance.
During the test device (1) and the substrate (2) consisting of insulating material, the substrate (2) capacitive electrode 3, a portion is exposed is installed in the substrate 2, to constitute a connection from the surface of the substrate 2, It has a common electrode 4 provided. Capacitive electrode 3 and the common electrode 4 are arranged spaced apart from each other has a parallel portion that is configured to be electrically isolated. Inspection device (1) it is combined in the gas 102 and the wiring board 101 of the inspection object having a wire 103 passing through it, connected to the connection portion of the one end of the wiring 103 and the capacitive electrode 3, and then, the wiring 103 of measuring the electrical capacitance between the common electrode and the other end (4) checks the wiring substrate 101.